10/28/2011	11:07:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	11:07:16 AM	Recipe started at 11:07 AM
10/28/2011	11:07:16 AM	Helium valve closed
10/28/2011	11:07:16 AM	H2 valve closed
10/28/2011	11:07:16 AM	BCl3 valve closed
10/28/2011	11:07:16 AM	PH3 valve closed
10/28/2011	11:07:16 AM	SiCl4 pre valve closed
10/28/2011	11:07:16 AM	SiCl4 post valve closed
10/28/2011	11:07:16 AM	Main Vac valve closed
10/28/2011	11:07:16 AM	Bypass valve closed
10/28/2011	11:07:16 AM	Bubbler valve closed
10/28/2011	11:07:16 AM	Helium MFC set to  0.000000
10/28/2011	11:07:16 AM	H2 MFC set to  0.000000
10/28/2011	11:07:16 AM	BCl3 MFC set to  0.000000
10/28/2011	11:07:16 AM	PHl3 MFC set to  0.000000
10/28/2011	11:07:16 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:07:16 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:07:16 AM	Tube furnace set to 0
10/28/2011	11:07:19 AM	H2 valve closed
10/28/2011	11:07:19 AM	BCl3 valve closed
10/28/2011	11:07:19 AM	PH3 valve closed
10/28/2011	11:07:19 AM	SiCl4 pre valve closed
10/28/2011	11:07:19 AM	SiCl4 post valve closed
10/28/2011	11:07:19 AM	Main Vac valve closed
10/28/2011	11:07:19 AM	Bypass valve closed
10/28/2011	11:07:19 AM	Bubbler valve closed
10/28/2011	11:07:19 AM	Helium valve opened
10/28/2011	11:07:19 AM	Helium MFC set to  500.000000
10/28/2011	11:07:19 AM	H2 MFC set to  0.000000
10/28/2011	11:07:19 AM	BCl3 MFC set to  0.000000
10/28/2011	11:07:19 AM	PHl3 MFC set to  0.000000
10/28/2011	11:07:19 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:07:19 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:07:20 AM	Tube furnace set to 0
10/28/2011	11:08:26 AM	Helium valve closed
10/28/2011	11:08:26 AM	H2 valve closed
10/28/2011	11:08:26 AM	BCl3 valve closed
10/28/2011	11:08:26 AM	PH3 valve closed
10/28/2011	11:08:26 AM	SiCl4 pre valve closed
10/28/2011	11:08:26 AM	SiCl4 post valve closed
10/28/2011	11:08:26 AM	Main Vac valve closed
10/28/2011	11:08:26 AM	Bypass valve closed
10/28/2011	11:08:26 AM	Bubbler valve closed
10/28/2011	11:08:26 AM	Helium MFC set to  0.000000
10/28/2011	11:08:26 AM	H2 MFC set to  0.000000
10/28/2011	11:08:26 AM	BCl3 MFC set to  0.000000
10/28/2011	11:08:26 AM	PHl3 MFC set to  0.000000
10/28/2011	11:08:26 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:08:26 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:08:26 AM	Tube furnace set to 0
10/28/2011	11:08:27 AM	Run finished at 11:08 AM
10/28/2011	11:08:27 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	11:15:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/28/2011	11:15:15 AM	Recipe started at 11:15 AM
10/28/2011	11:15:15 AM	Helium valve closed
10/28/2011	11:15:15 AM	H2 valve closed
10/28/2011	11:15:15 AM	BCl3 valve closed
10/28/2011	11:15:15 AM	PH3 valve closed
10/28/2011	11:15:15 AM	SiCl4 pre valve closed
10/28/2011	11:15:15 AM	SiCl4 post valve closed
10/28/2011	11:15:15 AM	Main Vac valve closed
10/28/2011	11:15:15 AM	Bubbler valve closed
10/28/2011	11:15:15 AM	Bypass valve opened
10/28/2011	11:15:15 AM	Helium MFC set to  0.000000
10/28/2011	11:15:15 AM	H2 MFC set to  0.000000
10/28/2011	11:15:15 AM	BCl3 MFC set to  0.000000
10/28/2011	11:15:15 AM	PHl3 MFC set to  0.000000
10/28/2011	11:15:15 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:15:15 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:15:16 AM	Tube furnace set to 0
10/28/2011	11:16:22 AM	Helium valve closed
10/28/2011	11:16:22 AM	H2 valve closed
10/28/2011	11:16:22 AM	BCl3 valve closed
10/28/2011	11:16:22 AM	PH3 valve closed
10/28/2011	11:16:22 AM	SiCl4 pre valve closed
10/28/2011	11:16:22 AM	SiCl4 post valve closed
10/28/2011	11:16:22 AM	Main Vac valve closed
10/28/2011	11:16:22 AM	Bubbler valve closed
10/28/2011	11:16:22 AM	Bypass valve opened
10/28/2011	11:16:22 AM	Helium MFC set to  0.000000
10/28/2011	11:16:22 AM	H2 MFC set to  0.000000
10/28/2011	11:16:22 AM	BCl3 MFC set to  0.000000
10/28/2011	11:16:22 AM	PHl3 MFC set to  0.000000
10/28/2011	11:16:22 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:16:22 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:16:22 AM	Tube furnace set to 0
10/28/2011	11:17:22 AM	Helium valve closed
10/28/2011	11:17:22 AM	H2 valve closed
10/28/2011	11:17:22 AM	BCl3 valve closed
10/28/2011	11:17:22 AM	PH3 valve closed
10/28/2011	11:17:22 AM	SiCl4 pre valve closed
10/28/2011	11:17:22 AM	SiCl4 post valve closed
10/28/2011	11:17:22 AM	Bypass valve closed
10/28/2011	11:17:22 AM	Bubbler valve closed
10/28/2011	11:17:22 AM	Main Vac valve opened
10/28/2011	11:17:22 AM	Helium MFC set to  0.000000
10/28/2011	11:17:22 AM	H2 MFC set to  0.000000
10/28/2011	11:17:22 AM	BCl3 MFC set to  0.000000
10/28/2011	11:17:22 AM	PHl3 MFC set to  0.000000
10/28/2011	11:17:22 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:17:22 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:17:22 AM	Tube furnace set to 0
10/28/2011	11:17:23 AM	Run finished at 11:17 AM
10/28/2011	11:17:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/28/2011	11:18:43 AM	Main Vac valve closed
10/28/2011	11:18:50 AM	Main Vac valve opened
10/28/2011	11:22:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/28/2011	11:23:04 AM	Recipe started at 11:22 AM
10/28/2011	11:23:04 AM	Helium valve closed
10/28/2011	11:23:04 AM	H2 valve closed
10/28/2011	11:23:04 AM	BCl3 valve closed
10/28/2011	11:23:04 AM	PH3 valve closed
10/28/2011	11:23:04 AM	SiCl4 pre valve closed
10/28/2011	11:23:04 AM	SiCl4 post valve closed
10/28/2011	11:23:04 AM	Main Vac valve closed
10/28/2011	11:23:04 AM	Bubbler valve closed
10/28/2011	11:23:04 AM	Bypass valve opened
10/28/2011	11:23:04 AM	Helium MFC set to  0.000000
10/28/2011	11:23:04 AM	H2 MFC set to  0.000000
10/28/2011	11:23:04 AM	BCl3 MFC set to  0.000000
10/28/2011	11:23:04 AM	PHl3 MFC set to  0.000000
10/28/2011	11:23:04 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:23:04 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:23:04 AM	Tube furnace set to 0
10/28/2011	11:23:04 AM	Helium valve closed
10/28/2011	11:23:04 AM	H2 valve closed
10/28/2011	11:23:04 AM	BCl3 valve closed
10/28/2011	11:23:04 AM	PH3 valve closed
10/28/2011	11:23:04 AM	SiCl4 pre valve closed
10/28/2011	11:23:04 AM	SiCl4 post valve closed
10/28/2011	11:23:04 AM	Main Vac valve closed
10/28/2011	11:23:04 AM	Bubbler valve closed
10/28/2011	11:23:04 AM	Bypass valve opened
10/28/2011	11:23:04 AM	Helium MFC set to  0.000000
10/28/2011	11:23:04 AM	H2 MFC set to  0.000000
10/28/2011	11:23:04 AM	BCl3 MFC set to  0.000000
10/28/2011	11:23:04 AM	PHl3 MFC set to  0.000000
10/28/2011	11:23:04 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:23:04 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:23:05 AM	Tube furnace set to 0
10/28/2011	11:23:15 AM	Helium valve closed
10/28/2011	11:23:15 AM	H2 valve closed
10/28/2011	11:23:15 AM	BCl3 valve closed
10/28/2011	11:23:15 AM	PH3 valve closed
10/28/2011	11:23:15 AM	SiCl4 pre valve closed
10/28/2011	11:23:15 AM	SiCl4 post valve closed
10/28/2011	11:23:15 AM	Bypass valve closed
10/28/2011	11:23:15 AM	Bubbler valve closed
10/28/2011	11:23:15 AM	Main Vac valve opened
10/28/2011	11:23:15 AM	Helium MFC set to  0.000000
10/28/2011	11:23:15 AM	H2 MFC set to  0.000000
10/28/2011	11:23:15 AM	BCl3 MFC set to  0.000000
10/28/2011	11:23:15 AM	PHl3 MFC set to  0.000000
10/28/2011	11:23:15 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:23:15 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:23:16 AM	Tube furnace set to 0
10/28/2011	11:23:46 AM	H2 valve closed
10/28/2011	11:23:46 AM	BCl3 valve closed
10/28/2011	11:23:46 AM	PH3 valve closed
10/28/2011	11:23:46 AM	SiCl4 pre valve closed
10/28/2011	11:23:46 AM	SiCl4 post valve closed
10/28/2011	11:23:46 AM	Bypass valve closed
10/28/2011	11:23:46 AM	Bubbler valve closed
10/28/2011	11:23:46 AM	Helium valve opened
10/28/2011	11:23:46 AM	Main Vac valve opened
10/28/2011	11:23:46 AM	Helium MFC set to  20.000000
10/28/2011	11:23:46 AM	H2 MFC set to  0.000000
10/28/2011	11:23:46 AM	BCl3 MFC set to  0.000000
10/28/2011	11:23:46 AM	PHl3 MFC set to  0.000000
10/28/2011	11:23:46 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:23:46 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:23:46 AM	Tube furnace set to 0
10/28/2011	11:24:16 AM	Helium valve closed
10/28/2011	11:24:16 AM	H2 valve closed
10/28/2011	11:24:16 AM	BCl3 valve closed
10/28/2011	11:24:16 AM	PH3 valve closed
10/28/2011	11:24:16 AM	SiCl4 pre valve closed
10/28/2011	11:24:16 AM	SiCl4 post valve closed
10/28/2011	11:24:16 AM	Bypass valve closed
10/28/2011	11:24:16 AM	Bubbler valve closed
10/28/2011	11:24:16 AM	Main Vac valve opened
10/28/2011	11:24:16 AM	Helium MFC set to  0.000000
10/28/2011	11:24:16 AM	H2 MFC set to  0.000000
10/28/2011	11:24:16 AM	BCl3 MFC set to  0.000000
10/28/2011	11:24:16 AM	PHl3 MFC set to  0.000000
10/28/2011	11:24:16 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:24:16 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:24:16 AM	Tube furnace set to 0
10/28/2011	11:24:46 AM	H2 valve closed
10/28/2011	11:24:46 AM	BCl3 valve closed
10/28/2011	11:24:46 AM	PH3 valve closed
10/28/2011	11:24:46 AM	SiCl4 pre valve closed
10/28/2011	11:24:46 AM	SiCl4 post valve closed
10/28/2011	11:24:46 AM	Bypass valve closed
10/28/2011	11:24:46 AM	Bubbler valve closed
10/28/2011	11:24:46 AM	Helium valve opened
10/28/2011	11:24:46 AM	Main Vac valve opened
10/28/2011	11:24:46 AM	Helium MFC set to  20.000000
10/28/2011	11:24:46 AM	H2 MFC set to  0.000000
10/28/2011	11:24:46 AM	BCl3 MFC set to  0.000000
10/28/2011	11:24:46 AM	PHl3 MFC set to  0.000000
10/28/2011	11:24:46 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:24:46 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:24:46 AM	Tube furnace set to 0
10/28/2011	11:25:16 AM	Helium valve closed
10/28/2011	11:25:16 AM	H2 valve closed
10/28/2011	11:25:16 AM	BCl3 valve closed
10/28/2011	11:25:16 AM	PH3 valve closed
10/28/2011	11:25:16 AM	SiCl4 pre valve closed
10/28/2011	11:25:16 AM	SiCl4 post valve closed
10/28/2011	11:25:16 AM	Bypass valve closed
10/28/2011	11:25:16 AM	Bubbler valve closed
10/28/2011	11:25:16 AM	Main Vac valve opened
10/28/2011	11:25:16 AM	Helium MFC set to  0.000000
10/28/2011	11:25:16 AM	H2 MFC set to  0.000000
10/28/2011	11:25:16 AM	BCl3 MFC set to  0.000000
10/28/2011	11:25:16 AM	PHl3 MFC set to  0.000000
10/28/2011	11:25:16 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:25:16 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:25:16 AM	Tube furnace set to 0
10/28/2011	11:25:46 AM	H2 valve closed
10/28/2011	11:25:46 AM	BCl3 valve closed
10/28/2011	11:25:46 AM	PH3 valve closed
10/28/2011	11:25:46 AM	SiCl4 pre valve closed
10/28/2011	11:25:46 AM	SiCl4 post valve closed
10/28/2011	11:25:46 AM	Bypass valve closed
10/28/2011	11:25:46 AM	Bubbler valve closed
10/28/2011	11:25:46 AM	Helium valve opened
10/28/2011	11:25:46 AM	Main Vac valve opened
10/28/2011	11:25:46 AM	Helium MFC set to  20.000000
10/28/2011	11:25:46 AM	H2 MFC set to  0.000000
10/28/2011	11:25:46 AM	BCl3 MFC set to  0.000000
10/28/2011	11:25:46 AM	PHl3 MFC set to  0.000000
10/28/2011	11:25:46 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:25:46 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:25:47 AM	Tube furnace set to 0
10/28/2011	11:26:17 AM	Helium valve closed
10/28/2011	11:26:17 AM	H2 valve closed
10/28/2011	11:26:17 AM	BCl3 valve closed
10/28/2011	11:26:17 AM	PH3 valve closed
10/28/2011	11:26:17 AM	SiCl4 pre valve closed
10/28/2011	11:26:17 AM	SiCl4 post valve closed
10/28/2011	11:26:17 AM	Bypass valve closed
10/28/2011	11:26:17 AM	Bubbler valve closed
10/28/2011	11:26:17 AM	Main Vac valve opened
10/28/2011	11:26:17 AM	Helium MFC set to  0.000000
10/28/2011	11:26:17 AM	H2 MFC set to  0.000000
10/28/2011	11:26:17 AM	BCl3 MFC set to  0.000000
10/28/2011	11:26:17 AM	PHl3 MFC set to  0.000000
10/28/2011	11:26:17 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:26:17 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:26:17 AM	Tube furnace set to 0
10/28/2011	11:26:47 AM	H2 valve closed
10/28/2011	11:26:47 AM	BCl3 valve closed
10/28/2011	11:26:47 AM	PH3 valve closed
10/28/2011	11:26:47 AM	SiCl4 pre valve closed
10/28/2011	11:26:47 AM	SiCl4 post valve closed
10/28/2011	11:26:47 AM	Bypass valve closed
10/28/2011	11:26:47 AM	Bubbler valve closed
10/28/2011	11:26:47 AM	Helium valve opened
10/28/2011	11:26:47 AM	Main Vac valve opened
10/28/2011	11:26:47 AM	Helium MFC set to  20.000000
10/28/2011	11:26:47 AM	H2 MFC set to  0.000000
10/28/2011	11:26:47 AM	BCl3 MFC set to  0.000000
10/28/2011	11:26:47 AM	PHl3 MFC set to  0.000000
10/28/2011	11:26:47 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:26:47 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:26:47 AM	Tube furnace set to 0
10/28/2011	11:27:17 AM	Helium valve closed
10/28/2011	11:27:17 AM	H2 valve closed
10/28/2011	11:27:17 AM	BCl3 valve closed
10/28/2011	11:27:17 AM	PH3 valve closed
10/28/2011	11:27:17 AM	SiCl4 pre valve closed
10/28/2011	11:27:17 AM	SiCl4 post valve closed
10/28/2011	11:27:17 AM	Bypass valve closed
10/28/2011	11:27:17 AM	Bubbler valve closed
10/28/2011	11:27:17 AM	Main Vac valve opened
10/28/2011	11:27:17 AM	Helium MFC set to  0.000000
10/28/2011	11:27:17 AM	H2 MFC set to  0.000000
10/28/2011	11:27:17 AM	BCl3 MFC set to  0.000000
10/28/2011	11:27:17 AM	PHl3 MFC set to  0.000000
10/28/2011	11:27:17 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:27:17 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:27:17 AM	Tube furnace set to 0
10/28/2011	11:27:47 AM	H2 valve closed
10/28/2011	11:27:47 AM	BCl3 valve closed
10/28/2011	11:27:47 AM	PH3 valve closed
10/28/2011	11:27:47 AM	SiCl4 pre valve closed
10/28/2011	11:27:47 AM	SiCl4 post valve closed
10/28/2011	11:27:47 AM	Bypass valve closed
10/28/2011	11:27:47 AM	Bubbler valve closed
10/28/2011	11:27:47 AM	Helium valve opened
10/28/2011	11:27:47 AM	Main Vac valve opened
10/28/2011	11:27:47 AM	Helium MFC set to  20.000000
10/28/2011	11:27:47 AM	H2 MFC set to  0.000000
10/28/2011	11:27:47 AM	BCl3 MFC set to  0.000000
10/28/2011	11:27:47 AM	PHl3 MFC set to  0.000000
10/28/2011	11:27:47 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:27:47 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:27:47 AM	Tube furnace set to 0
10/28/2011	11:28:17 AM	Helium valve closed
10/28/2011	11:28:17 AM	H2 valve closed
10/28/2011	11:28:17 AM	BCl3 valve closed
10/28/2011	11:28:17 AM	PH3 valve closed
10/28/2011	11:28:17 AM	SiCl4 pre valve closed
10/28/2011	11:28:17 AM	SiCl4 post valve closed
10/28/2011	11:28:17 AM	Bypass valve closed
10/28/2011	11:28:17 AM	Bubbler valve closed
10/28/2011	11:28:17 AM	Main Vac valve opened
10/28/2011	11:28:17 AM	Helium MFC set to  0.000000
10/28/2011	11:28:17 AM	H2 MFC set to  0.000000
10/28/2011	11:28:17 AM	BCl3 MFC set to  0.000000
10/28/2011	11:28:17 AM	PHl3 MFC set to  0.000000
10/28/2011	11:28:17 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:28:17 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:28:18 AM	Tube furnace set to 0
10/28/2011	11:28:48 AM	H2 valve closed
10/28/2011	11:28:48 AM	BCl3 valve closed
10/28/2011	11:28:48 AM	PH3 valve closed
10/28/2011	11:28:48 AM	SiCl4 pre valve closed
10/28/2011	11:28:48 AM	SiCl4 post valve closed
10/28/2011	11:28:48 AM	Bypass valve closed
10/28/2011	11:28:48 AM	Bubbler valve closed
10/28/2011	11:28:48 AM	Helium valve opened
10/28/2011	11:28:48 AM	Main Vac valve opened
10/28/2011	11:28:48 AM	Helium MFC set to  20.000000
10/28/2011	11:28:48 AM	H2 MFC set to  0.000000
10/28/2011	11:28:48 AM	BCl3 MFC set to  0.000000
10/28/2011	11:28:48 AM	PHl3 MFC set to  0.000000
10/28/2011	11:28:48 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:28:48 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:28:48 AM	Tube furnace set to 0
10/28/2011	11:29:18 AM	Helium valve closed
10/28/2011	11:29:18 AM	H2 valve closed
10/28/2011	11:29:18 AM	BCl3 valve closed
10/28/2011	11:29:18 AM	PH3 valve closed
10/28/2011	11:29:18 AM	SiCl4 pre valve closed
10/28/2011	11:29:18 AM	SiCl4 post valve closed
10/28/2011	11:29:18 AM	Bypass valve closed
10/28/2011	11:29:18 AM	Bubbler valve closed
10/28/2011	11:29:18 AM	Main Vac valve opened
10/28/2011	11:29:18 AM	Helium MFC set to  0.000000
10/28/2011	11:29:18 AM	H2 MFC set to  0.000000
10/28/2011	11:29:18 AM	BCl3 MFC set to  0.000000
10/28/2011	11:29:18 AM	PHl3 MFC set to  0.000000
10/28/2011	11:29:18 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:29:18 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:29:18 AM	Tube furnace set to 0
10/28/2011	11:29:48 AM	H2 valve closed
10/28/2011	11:29:48 AM	BCl3 valve closed
10/28/2011	11:29:48 AM	PH3 valve closed
10/28/2011	11:29:48 AM	SiCl4 pre valve closed
10/28/2011	11:29:48 AM	SiCl4 post valve closed
10/28/2011	11:29:48 AM	Bypass valve closed
10/28/2011	11:29:48 AM	Bubbler valve closed
10/28/2011	11:29:48 AM	Helium valve opened
10/28/2011	11:29:48 AM	Main Vac valve opened
10/28/2011	11:29:48 AM	Helium MFC set to  20.000000
10/28/2011	11:29:48 AM	H2 MFC set to  0.000000
10/28/2011	11:29:48 AM	BCl3 MFC set to  0.000000
10/28/2011	11:29:48 AM	PHl3 MFC set to  0.000000
10/28/2011	11:29:48 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:29:48 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:29:48 AM	Tube furnace set to 0
10/28/2011	11:30:18 AM	Helium valve closed
10/28/2011	11:30:18 AM	H2 valve closed
10/28/2011	11:30:18 AM	BCl3 valve closed
10/28/2011	11:30:18 AM	PH3 valve closed
10/28/2011	11:30:18 AM	SiCl4 pre valve closed
10/28/2011	11:30:18 AM	SiCl4 post valve closed
10/28/2011	11:30:18 AM	Bypass valve closed
10/28/2011	11:30:18 AM	Bubbler valve closed
10/28/2011	11:30:18 AM	Main Vac valve opened
10/28/2011	11:30:18 AM	Helium MFC set to  0.000000
10/28/2011	11:30:18 AM	H2 MFC set to  0.000000
10/28/2011	11:30:18 AM	BCl3 MFC set to  0.000000
10/28/2011	11:30:18 AM	PHl3 MFC set to  0.000000
10/28/2011	11:30:18 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:30:18 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:30:18 AM	Tube furnace set to 0
10/28/2011	11:30:48 AM	H2 valve closed
10/28/2011	11:30:48 AM	BCl3 valve closed
10/28/2011	11:30:48 AM	PH3 valve closed
10/28/2011	11:30:48 AM	SiCl4 pre valve closed
10/28/2011	11:30:48 AM	SiCl4 post valve closed
10/28/2011	11:30:48 AM	Bypass valve closed
10/28/2011	11:30:48 AM	Bubbler valve closed
10/28/2011	11:30:48 AM	Helium valve opened
10/28/2011	11:30:48 AM	Main Vac valve opened
10/28/2011	11:30:48 AM	Helium MFC set to  20.000000
10/28/2011	11:30:48 AM	H2 MFC set to  0.000000
10/28/2011	11:30:48 AM	BCl3 MFC set to  0.000000
10/28/2011	11:30:48 AM	PHl3 MFC set to  0.000000
10/28/2011	11:30:48 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:30:48 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:30:49 AM	Tube furnace set to 0
10/28/2011	11:31:19 AM	Helium valve closed
10/28/2011	11:31:19 AM	H2 valve closed
10/28/2011	11:31:19 AM	BCl3 valve closed
10/28/2011	11:31:19 AM	PH3 valve closed
10/28/2011	11:31:19 AM	SiCl4 pre valve closed
10/28/2011	11:31:19 AM	SiCl4 post valve closed
10/28/2011	11:31:19 AM	Bypass valve closed
10/28/2011	11:31:19 AM	Bubbler valve closed
10/28/2011	11:31:19 AM	Main Vac valve opened
10/28/2011	11:31:19 AM	Helium MFC set to  0.000000
10/28/2011	11:31:19 AM	H2 MFC set to  0.000000
10/28/2011	11:31:19 AM	BCl3 MFC set to  0.000000
10/28/2011	11:31:19 AM	PHl3 MFC set to  0.000000
10/28/2011	11:31:19 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:31:19 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:31:19 AM	Tube furnace set to 0
10/28/2011	11:31:49 AM	H2 valve closed
10/28/2011	11:31:49 AM	BCl3 valve closed
10/28/2011	11:31:49 AM	PH3 valve closed
10/28/2011	11:31:49 AM	SiCl4 pre valve closed
10/28/2011	11:31:49 AM	SiCl4 post valve closed
10/28/2011	11:31:49 AM	Bypass valve closed
10/28/2011	11:31:49 AM	Bubbler valve closed
10/28/2011	11:31:49 AM	Helium valve opened
10/28/2011	11:31:49 AM	Main Vac valve opened
10/28/2011	11:31:49 AM	Helium MFC set to  20.000000
10/28/2011	11:31:49 AM	H2 MFC set to  0.000000
10/28/2011	11:31:49 AM	BCl3 MFC set to  0.000000
10/28/2011	11:31:49 AM	PHl3 MFC set to  0.000000
10/28/2011	11:31:49 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:31:49 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:31:49 AM	Tube furnace set to 0
10/28/2011	11:32:19 AM	Helium valve closed
10/28/2011	11:32:19 AM	H2 valve closed
10/28/2011	11:32:19 AM	BCl3 valve closed
10/28/2011	11:32:19 AM	PH3 valve closed
10/28/2011	11:32:19 AM	SiCl4 pre valve closed
10/28/2011	11:32:19 AM	SiCl4 post valve closed
10/28/2011	11:32:19 AM	Bypass valve closed
10/28/2011	11:32:19 AM	Bubbler valve closed
10/28/2011	11:32:19 AM	Main Vac valve opened
10/28/2011	11:32:19 AM	Helium MFC set to  0.000000
10/28/2011	11:32:19 AM	H2 MFC set to  0.000000
10/28/2011	11:32:19 AM	BCl3 MFC set to  0.000000
10/28/2011	11:32:19 AM	PHl3 MFC set to  0.000000
10/28/2011	11:32:19 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:32:19 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:32:19 AM	Tube furnace set to 0
10/28/2011	11:32:49 AM	H2 valve closed
10/28/2011	11:32:49 AM	BCl3 valve closed
10/28/2011	11:32:49 AM	PH3 valve closed
10/28/2011	11:32:49 AM	SiCl4 pre valve closed
10/28/2011	11:32:49 AM	SiCl4 post valve closed
10/28/2011	11:32:49 AM	Bypass valve closed
10/28/2011	11:32:49 AM	Bubbler valve closed
10/28/2011	11:32:49 AM	Helium valve opened
10/28/2011	11:32:49 AM	Main Vac valve opened
10/28/2011	11:32:49 AM	Helium MFC set to  20.000000
10/28/2011	11:32:49 AM	H2 MFC set to  0.000000
10/28/2011	11:32:49 AM	BCl3 MFC set to  0.000000
10/28/2011	11:32:49 AM	PHl3 MFC set to  0.000000
10/28/2011	11:32:49 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:32:49 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:32:49 AM	Tube furnace set to 0
10/28/2011	11:33:19 AM	Helium valve closed
10/28/2011	11:33:19 AM	H2 valve closed
10/28/2011	11:33:19 AM	BCl3 valve closed
10/28/2011	11:33:19 AM	PH3 valve closed
10/28/2011	11:33:19 AM	SiCl4 pre valve closed
10/28/2011	11:33:19 AM	SiCl4 post valve closed
10/28/2011	11:33:19 AM	Bypass valve closed
10/28/2011	11:33:19 AM	Bubbler valve closed
10/28/2011	11:33:19 AM	Main Vac valve opened
10/28/2011	11:33:19 AM	Helium MFC set to  0.000000
10/28/2011	11:33:19 AM	H2 MFC set to  0.000000
10/28/2011	11:33:19 AM	BCl3 MFC set to  0.000000
10/28/2011	11:33:19 AM	PHl3 MFC set to  0.000000
10/28/2011	11:33:19 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:33:19 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:33:20 AM	Tube furnace set to 0
10/28/2011	11:33:21 AM	Run finished at 11:33 AM
10/28/2011	11:33:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/28/2011	11:35:27 AM	Recipe started at 11:35 AM
10/28/2011	11:35:27 AM	Helium valve closed
10/28/2011	11:35:27 AM	H2 valve closed
10/28/2011	11:35:27 AM	BCl3 valve closed
10/28/2011	11:35:27 AM	PH3 valve closed
10/28/2011	11:35:27 AM	SiCl4 pre valve closed
10/28/2011	11:35:27 AM	SiCl4 post valve closed
10/28/2011	11:35:27 AM	Main Vac valve closed
10/28/2011	11:35:27 AM	Bypass valve closed
10/28/2011	11:35:27 AM	Bubbler valve closed
10/28/2011	11:35:27 AM	Helium MFC set to  0.000000
10/28/2011	11:35:27 AM	H2 MFC set to  0.000000
10/28/2011	11:35:28 AM	BCl3 MFC set to  0.000000
10/28/2011	11:35:28 AM	PHl3 MFC set to  0.000000
10/28/2011	11:35:28 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:35:28 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:35:28 AM	Tube furnace set to 0
10/28/2011	11:35:31 AM	Helium valve closed
10/28/2011	11:35:31 AM	BCl3 valve closed
10/28/2011	11:35:31 AM	PH3 valve closed
10/28/2011	11:35:31 AM	SiCl4 pre valve closed
10/28/2011	11:35:31 AM	SiCl4 post valve closed
10/28/2011	11:35:31 AM	Main Vac valve closed
10/28/2011	11:35:31 AM	Bypass valve closed
10/28/2011	11:35:31 AM	Bubbler valve closed
10/28/2011	11:35:31 AM	H2 valve opened
10/28/2011	11:35:31 AM	Helium MFC set to  0.000000
10/28/2011	11:35:31 AM	H2 MFC set to  500.000000
10/28/2011	11:35:31 AM	BCl3 MFC set to  0.000000
10/28/2011	11:35:31 AM	PHl3 MFC set to  0.000000
10/28/2011	11:35:31 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:35:31 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:35:31 AM	Tube furnace set to 0
10/28/2011	11:36:39 AM	Helium valve closed
10/28/2011	11:36:39 AM	BCl3 valve closed
10/28/2011	11:36:39 AM	PH3 valve closed
10/28/2011	11:36:39 AM	SiCl4 pre valve closed
10/28/2011	11:36:39 AM	SiCl4 post valve closed
10/28/2011	11:36:39 AM	Main Vac valve closed
10/28/2011	11:36:39 AM	Bypass valve closed
10/28/2011	11:36:39 AM	H2 valve opened
10/28/2011	11:36:39 AM	Bubbler valve opened
10/28/2011	11:36:39 AM	Helium MFC set to  0.000000
10/28/2011	11:36:39 AM	H2 MFC set to  500.000000
10/28/2011	11:36:39 AM	BCl3 MFC set to  0.000000
10/28/2011	11:36:39 AM	PHl3 MFC set to  0.000000
10/28/2011	11:36:39 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:36:39 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:36:39 AM	Tube furnace set to 0
10/28/2011	11:36:40 AM	Helium valve closed
10/28/2011	11:36:40 AM	BCl3 valve closed
10/28/2011	11:36:40 AM	PH3 valve closed
10/28/2011	11:36:40 AM	SiCl4 pre valve closed
10/28/2011	11:36:40 AM	SiCl4 post valve closed
10/28/2011	11:36:40 AM	Main Vac valve closed
10/28/2011	11:36:40 AM	Bypass valve closed
10/28/2011	11:36:40 AM	H2 valve opened
10/28/2011	11:36:40 AM	Bubbler valve opened
10/28/2011	11:36:40 AM	Helium MFC set to  0.000000
10/28/2011	11:36:40 AM	H2 MFC set to  500.000000
10/28/2011	11:36:40 AM	BCl3 MFC set to  0.000000
10/28/2011	11:36:40 AM	PHl3 MFC set to  0.000000
10/28/2011	11:36:40 AM	SiCl4 MFC set to  0.000000
10/28/2011	11:36:40 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:36:40 AM	Tube furnace set to 1010
10/28/2011	11:56:40 AM	Helium valve closed
10/28/2011	11:56:40 AM	PH3 valve closed
10/28/2011	11:56:40 AM	Main Vac valve closed
10/28/2011	11:56:40 AM	Bypass valve closed
10/28/2011	11:56:40 AM	H2 valve opened
10/28/2011	11:56:40 AM	BCl3 valve opened
10/28/2011	11:56:40 AM	SiCl4 pre valve opened
10/28/2011	11:56:40 AM	SiCl4 post valve opened
10/28/2011	11:56:40 AM	Bubbler valve opened
10/28/2011	11:56:40 AM	Helium MFC set to  0.000000
10/28/2011	11:56:40 AM	H2 MFC set to  500.000000
10/28/2011	11:56:40 AM	BCl3 MFC set to  2.000000
10/28/2011	11:56:40 AM	PHl3 MFC set to  0.000000
10/28/2011	11:56:40 AM	SiCl4 MFC set to  50.000000
10/28/2011	11:56:40 AM	Bypass solenoid MFC set to  0.000000
10/28/2011	11:56:40 AM	Tube furnace set to 1000
10/28/2011	12:16:40 PM	Helium valve closed
10/28/2011	12:16:40 PM	BCl3 valve closed
10/28/2011	12:16:40 PM	PH3 valve closed
10/28/2011	12:16:40 PM	SiCl4 pre valve closed
10/28/2011	12:16:40 PM	SiCl4 post valve closed
10/28/2011	12:16:40 PM	Main Vac valve closed
10/28/2011	12:16:40 PM	Bypass valve closed
10/28/2011	12:16:40 PM	H2 valve opened
10/28/2011	12:16:40 PM	Bubbler valve opened
10/28/2011	12:16:40 PM	Helium MFC set to  0.000000
10/28/2011	12:16:40 PM	H2 MFC set to  500.000000
10/28/2011	12:16:40 PM	BCl3 MFC set to  0.000000
10/28/2011	12:16:40 PM	PHl3 MFC set to  0.000000
10/28/2011	12:16:40 PM	SiCl4 MFC set to  0.000000
10/28/2011	12:16:40 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	12:16:41 PM	Tube furnace set to 750
10/28/2011	12:21:41 PM	H2 valve closed
10/28/2011	12:21:41 PM	BCl3 valve closed
10/28/2011	12:21:41 PM	PH3 valve closed
10/28/2011	12:21:41 PM	SiCl4 pre valve closed
10/28/2011	12:21:41 PM	SiCl4 post valve closed
10/28/2011	12:21:41 PM	Main Vac valve closed
10/28/2011	12:21:41 PM	Bypass valve closed
10/28/2011	12:21:41 PM	Helium valve opened
10/28/2011	12:21:41 PM	Bubbler valve opened
10/28/2011	12:21:41 PM	Helium MFC set to  500.000000
10/28/2011	12:21:41 PM	H2 MFC set to  0.000000
10/28/2011	12:21:41 PM	BCl3 MFC set to  0.000000
10/28/2011	12:21:41 PM	PHl3 MFC set to  0.000000
10/28/2011	12:21:41 PM	SiCl4 MFC set to  0.000000
10/28/2011	12:21:41 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	12:21:41 PM	Tube furnace set to 0
10/28/2011	12:41:41 PM	Helium valve closed
10/28/2011	12:41:41 PM	H2 valve closed
10/28/2011	12:41:41 PM	BCl3 valve closed
10/28/2011	12:41:41 PM	PH3 valve closed
10/28/2011	12:41:41 PM	SiCl4 pre valve closed
10/28/2011	12:41:41 PM	SiCl4 post valve closed
10/28/2011	12:41:41 PM	Main Vac valve closed
10/28/2011	12:41:41 PM	Bypass valve closed
10/28/2011	12:41:41 PM	Bubbler valve closed
10/28/2011	12:41:41 PM	Helium MFC set to  0.000000
10/28/2011	12:41:41 PM	H2 MFC set to  0.000000
10/28/2011	12:41:41 PM	BCl3 MFC set to  0.000000
10/28/2011	12:41:41 PM	PHl3 MFC set to  0.000000
10/28/2011	12:41:41 PM	SiCl4 MFC set to  0.000000
10/28/2011	12:41:41 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	12:41:41 PM	Tube furnace set to 0
10/28/2011	12:41:42 PM	Run finished at 12:41 PM
10/28/2011	1:52:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	1:52:04 PM	Recipe started at 1:52 PM
10/28/2011	1:52:04 PM	Helium valve closed
10/28/2011	1:52:04 PM	H2 valve closed
10/28/2011	1:52:04 PM	BCl3 valve closed
10/28/2011	1:52:04 PM	PH3 valve closed
10/28/2011	1:52:04 PM	SiCl4 pre valve closed
10/28/2011	1:52:04 PM	SiCl4 post valve closed
10/28/2011	1:52:04 PM	Main Vac valve closed
10/28/2011	1:52:04 PM	Bypass valve closed
10/28/2011	1:52:04 PM	Bubbler valve closed
10/28/2011	1:52:04 PM	Helium MFC set to  0.000000
10/28/2011	1:52:04 PM	H2 MFC set to  0.000000
10/28/2011	1:52:04 PM	BCl3 MFC set to  0.000000
10/28/2011	1:52:04 PM	PHl3 MFC set to  0.000000
10/28/2011	1:52:04 PM	SiCl4 MFC set to  0.000000
10/28/2011	1:52:04 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	1:52:04 PM	Tube furnace set to 0
10/28/2011	1:52:08 PM	H2 valve closed
10/28/2011	1:52:08 PM	BCl3 valve closed
10/28/2011	1:52:08 PM	PH3 valve closed
10/28/2011	1:52:08 PM	SiCl4 pre valve closed
10/28/2011	1:52:08 PM	SiCl4 post valve closed
10/28/2011	1:52:08 PM	Main Vac valve closed
10/28/2011	1:52:08 PM	Bypass valve closed
10/28/2011	1:52:08 PM	Bubbler valve closed
10/28/2011	1:52:08 PM	Helium valve opened
10/28/2011	1:52:08 PM	Helium MFC set to  500.000000
10/28/2011	1:52:08 PM	H2 MFC set to  0.000000
10/28/2011	1:52:08 PM	BCl3 MFC set to  0.000000
10/28/2011	1:52:08 PM	PHl3 MFC set to  0.000000
10/28/2011	1:52:08 PM	SiCl4 MFC set to  0.000000
10/28/2011	1:52:08 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	1:52:08 PM	Tube furnace set to 0
10/28/2011	1:52:12 PM	Helium valve closed
10/28/2011	1:52:12 PM	H2 valve closed
10/28/2011	1:52:12 PM	BCl3 valve closed
10/28/2011	1:52:12 PM	PH3 valve closed
10/28/2011	1:52:12 PM	SiCl4 pre valve closed
10/28/2011	1:52:12 PM	SiCl4 post valve closed
10/28/2011	1:52:12 PM	Main Vac valve closed
10/28/2011	1:52:12 PM	Bypass valve closed
10/28/2011	1:52:12 PM	Bubbler valve closed
10/28/2011	1:52:12 PM	Helium MFC set to  0.000000
10/28/2011	1:52:12 PM	H2 MFC set to  0.000000
10/28/2011	1:52:12 PM	BCl3 MFC set to  0.000000
10/28/2011	1:52:12 PM	PHl3 MFC set to  0.000000
10/28/2011	1:52:12 PM	SiCl4 MFC set to  0.000000
10/28/2011	1:52:12 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	1:52:12 PM	Tube furnace set to 0
10/28/2011	1:52:13 PM	Run finished at 1:52 PM
10/28/2011	1:52:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	1:57:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/28/2011	1:57:53 PM	Recipe started at 1:57 PM
10/28/2011	1:57:53 PM	Helium valve closed
10/28/2011	1:57:53 PM	H2 valve closed
10/28/2011	1:57:53 PM	BCl3 valve closed
10/28/2011	1:57:53 PM	PH3 valve closed
10/28/2011	1:57:53 PM	SiCl4 pre valve closed
10/28/2011	1:57:53 PM	SiCl4 post valve closed
10/28/2011	1:57:53 PM	Main Vac valve closed
10/28/2011	1:57:53 PM	Bubbler valve closed
10/28/2011	1:57:53 PM	Bypass valve opened
10/28/2011	1:57:53 PM	Helium MFC set to  0.000000
10/28/2011	1:57:53 PM	H2 MFC set to  0.000000
10/28/2011	1:57:53 PM	BCl3 MFC set to  0.000000
10/28/2011	1:57:53 PM	PHl3 MFC set to  0.000000
10/28/2011	1:57:53 PM	SiCl4 MFC set to  0.000000
10/28/2011	1:57:53 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	1:57:53 PM	Tube furnace set to 0
10/28/2011	1:58:55 PM	Helium valve closed
10/28/2011	1:58:55 PM	H2 valve closed
10/28/2011	1:58:55 PM	BCl3 valve closed
10/28/2011	1:58:55 PM	PH3 valve closed
10/28/2011	1:58:55 PM	SiCl4 pre valve closed
10/28/2011	1:58:55 PM	SiCl4 post valve closed
10/28/2011	1:58:55 PM	Main Vac valve closed
10/28/2011	1:58:55 PM	Bubbler valve closed
10/28/2011	1:58:55 PM	Bypass valve opened
10/28/2011	1:58:55 PM	Helium MFC set to  0.000000
10/28/2011	1:58:55 PM	H2 MFC set to  0.000000
10/28/2011	1:58:55 PM	BCl3 MFC set to  0.000000
10/28/2011	1:58:55 PM	PHl3 MFC set to  0.000000
10/28/2011	1:58:55 PM	SiCl4 MFC set to  0.000000
10/28/2011	1:58:55 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	1:58:55 PM	Tube furnace set to 0
10/28/2011	1:59:25 PM	Helium valve closed
10/28/2011	1:59:25 PM	H2 valve closed
10/28/2011	1:59:25 PM	BCl3 valve closed
10/28/2011	1:59:25 PM	PH3 valve closed
10/28/2011	1:59:25 PM	SiCl4 pre valve closed
10/28/2011	1:59:25 PM	SiCl4 post valve closed
10/28/2011	1:59:25 PM	Bypass valve closed
10/28/2011	1:59:25 PM	Bubbler valve closed
10/28/2011	1:59:25 PM	Main Vac valve opened
10/28/2011	1:59:25 PM	Helium MFC set to  0.000000
10/28/2011	1:59:25 PM	H2 MFC set to  0.000000
10/28/2011	1:59:25 PM	BCl3 MFC set to  0.000000
10/28/2011	1:59:25 PM	PHl3 MFC set to  0.000000
10/28/2011	1:59:25 PM	SiCl4 MFC set to  0.000000
10/28/2011	1:59:25 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	1:59:26 PM	Tube furnace set to 0
10/28/2011	1:59:56 PM	H2 valve closed
10/28/2011	1:59:56 PM	BCl3 valve closed
10/28/2011	1:59:56 PM	PH3 valve closed
10/28/2011	1:59:56 PM	SiCl4 pre valve closed
10/28/2011	1:59:56 PM	SiCl4 post valve closed
10/28/2011	1:59:56 PM	Bypass valve closed
10/28/2011	1:59:56 PM	Bubbler valve closed
10/28/2011	1:59:56 PM	Helium valve opened
10/28/2011	1:59:56 PM	Main Vac valve opened
10/28/2011	1:59:56 PM	Helium MFC set to  20.000000
10/28/2011	1:59:56 PM	H2 MFC set to  0.000000
10/28/2011	1:59:56 PM	BCl3 MFC set to  0.000000
10/28/2011	1:59:56 PM	PHl3 MFC set to  0.000000
10/28/2011	1:59:56 PM	SiCl4 MFC set to  0.000000
10/28/2011	1:59:56 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	1:59:56 PM	Tube furnace set to 0
10/28/2011	2:00:26 PM	Helium valve closed
10/28/2011	2:00:26 PM	H2 valve closed
10/28/2011	2:00:26 PM	BCl3 valve closed
10/28/2011	2:00:26 PM	PH3 valve closed
10/28/2011	2:00:26 PM	SiCl4 pre valve closed
10/28/2011	2:00:26 PM	SiCl4 post valve closed
10/28/2011	2:00:26 PM	Bypass valve closed
10/28/2011	2:00:26 PM	Bubbler valve closed
10/28/2011	2:00:26 PM	Main Vac valve opened
10/28/2011	2:00:26 PM	Helium MFC set to  0.000000
10/28/2011	2:00:26 PM	H2 MFC set to  0.000000
10/28/2011	2:00:26 PM	BCl3 MFC set to  0.000000
10/28/2011	2:00:26 PM	PHl3 MFC set to  0.000000
10/28/2011	2:00:26 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:00:26 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:00:26 PM	Tube furnace set to 0
10/28/2011	2:00:56 PM	H2 valve closed
10/28/2011	2:00:56 PM	BCl3 valve closed
10/28/2011	2:00:56 PM	PH3 valve closed
10/28/2011	2:00:56 PM	SiCl4 pre valve closed
10/28/2011	2:00:56 PM	SiCl4 post valve closed
10/28/2011	2:00:56 PM	Bypass valve closed
10/28/2011	2:00:56 PM	Bubbler valve closed
10/28/2011	2:00:56 PM	Helium valve opened
10/28/2011	2:00:56 PM	Main Vac valve opened
10/28/2011	2:00:56 PM	Helium MFC set to  20.000000
10/28/2011	2:00:56 PM	H2 MFC set to  0.000000
10/28/2011	2:00:56 PM	BCl3 MFC set to  0.000000
10/28/2011	2:00:56 PM	PHl3 MFC set to  0.000000
10/28/2011	2:00:56 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:00:56 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:00:56 PM	Tube furnace set to 0
10/28/2011	2:01:26 PM	Helium valve closed
10/28/2011	2:01:26 PM	H2 valve closed
10/28/2011	2:01:26 PM	BCl3 valve closed
10/28/2011	2:01:26 PM	PH3 valve closed
10/28/2011	2:01:26 PM	SiCl4 pre valve closed
10/28/2011	2:01:26 PM	SiCl4 post valve closed
10/28/2011	2:01:26 PM	Bypass valve closed
10/28/2011	2:01:26 PM	Bubbler valve closed
10/28/2011	2:01:26 PM	Main Vac valve opened
10/28/2011	2:01:26 PM	Helium MFC set to  0.000000
10/28/2011	2:01:26 PM	H2 MFC set to  0.000000
10/28/2011	2:01:26 PM	BCl3 MFC set to  0.000000
10/28/2011	2:01:26 PM	PHl3 MFC set to  0.000000
10/28/2011	2:01:26 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:01:26 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:01:26 PM	Tube furnace set to 0
10/28/2011	2:01:56 PM	H2 valve closed
10/28/2011	2:01:56 PM	BCl3 valve closed
10/28/2011	2:01:56 PM	PH3 valve closed
10/28/2011	2:01:56 PM	SiCl4 pre valve closed
10/28/2011	2:01:56 PM	SiCl4 post valve closed
10/28/2011	2:01:56 PM	Bypass valve closed
10/28/2011	2:01:56 PM	Bubbler valve closed
10/28/2011	2:01:56 PM	Helium valve opened
10/28/2011	2:01:56 PM	Main Vac valve opened
10/28/2011	2:01:56 PM	Helium MFC set to  20.000000
10/28/2011	2:01:56 PM	H2 MFC set to  0.000000
10/28/2011	2:01:56 PM	BCl3 MFC set to  0.000000
10/28/2011	2:01:56 PM	PHl3 MFC set to  0.000000
10/28/2011	2:01:56 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:01:56 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:01:57 PM	Tube furnace set to 0
10/28/2011	2:02:27 PM	Helium valve closed
10/28/2011	2:02:27 PM	H2 valve closed
10/28/2011	2:02:27 PM	BCl3 valve closed
10/28/2011	2:02:27 PM	PH3 valve closed
10/28/2011	2:02:27 PM	SiCl4 pre valve closed
10/28/2011	2:02:27 PM	SiCl4 post valve closed
10/28/2011	2:02:27 PM	Bypass valve closed
10/28/2011	2:02:27 PM	Bubbler valve closed
10/28/2011	2:02:27 PM	Main Vac valve opened
10/28/2011	2:02:27 PM	Helium MFC set to  0.000000
10/28/2011	2:02:27 PM	H2 MFC set to  0.000000
10/28/2011	2:02:27 PM	BCl3 MFC set to  0.000000
10/28/2011	2:02:27 PM	PHl3 MFC set to  0.000000
10/28/2011	2:02:27 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:02:27 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:02:27 PM	Tube furnace set to 0
10/28/2011	2:02:57 PM	H2 valve closed
10/28/2011	2:02:57 PM	BCl3 valve closed
10/28/2011	2:02:57 PM	PH3 valve closed
10/28/2011	2:02:57 PM	SiCl4 pre valve closed
10/28/2011	2:02:57 PM	SiCl4 post valve closed
10/28/2011	2:02:57 PM	Bypass valve closed
10/28/2011	2:02:57 PM	Bubbler valve closed
10/28/2011	2:02:57 PM	Helium valve opened
10/28/2011	2:02:57 PM	Main Vac valve opened
10/28/2011	2:02:57 PM	Helium MFC set to  20.000000
10/28/2011	2:02:57 PM	H2 MFC set to  0.000000
10/28/2011	2:02:57 PM	BCl3 MFC set to  0.000000
10/28/2011	2:02:57 PM	PHl3 MFC set to  0.000000
10/28/2011	2:02:57 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:02:57 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:02:57 PM	Tube furnace set to 0
10/28/2011	2:03:27 PM	Helium valve closed
10/28/2011	2:03:27 PM	H2 valve closed
10/28/2011	2:03:27 PM	BCl3 valve closed
10/28/2011	2:03:27 PM	PH3 valve closed
10/28/2011	2:03:27 PM	SiCl4 pre valve closed
10/28/2011	2:03:27 PM	SiCl4 post valve closed
10/28/2011	2:03:27 PM	Bypass valve closed
10/28/2011	2:03:27 PM	Bubbler valve closed
10/28/2011	2:03:27 PM	Main Vac valve opened
10/28/2011	2:03:27 PM	Helium MFC set to  0.000000
10/28/2011	2:03:27 PM	H2 MFC set to  0.000000
10/28/2011	2:03:27 PM	BCl3 MFC set to  0.000000
10/28/2011	2:03:27 PM	PHl3 MFC set to  0.000000
10/28/2011	2:03:27 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:03:27 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:03:27 PM	Tube furnace set to 0
10/28/2011	2:03:57 PM	H2 valve closed
10/28/2011	2:03:57 PM	BCl3 valve closed
10/28/2011	2:03:57 PM	PH3 valve closed
10/28/2011	2:03:57 PM	SiCl4 pre valve closed
10/28/2011	2:03:57 PM	SiCl4 post valve closed
10/28/2011	2:03:57 PM	Bypass valve closed
10/28/2011	2:03:57 PM	Bubbler valve closed
10/28/2011	2:03:57 PM	Helium valve opened
10/28/2011	2:03:57 PM	Main Vac valve opened
10/28/2011	2:03:57 PM	Helium MFC set to  20.000000
10/28/2011	2:03:57 PM	H2 MFC set to  0.000000
10/28/2011	2:03:57 PM	BCl3 MFC set to  0.000000
10/28/2011	2:03:57 PM	PHl3 MFC set to  0.000000
10/28/2011	2:03:57 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:03:57 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:03:57 PM	Tube furnace set to 0
10/28/2011	2:04:27 PM	Helium valve closed
10/28/2011	2:04:27 PM	H2 valve closed
10/28/2011	2:04:27 PM	BCl3 valve closed
10/28/2011	2:04:27 PM	PH3 valve closed
10/28/2011	2:04:27 PM	SiCl4 pre valve closed
10/28/2011	2:04:27 PM	SiCl4 post valve closed
10/28/2011	2:04:27 PM	Bypass valve closed
10/28/2011	2:04:27 PM	Bubbler valve closed
10/28/2011	2:04:27 PM	Main Vac valve opened
10/28/2011	2:04:27 PM	Helium MFC set to  0.000000
10/28/2011	2:04:27 PM	H2 MFC set to  0.000000
10/28/2011	2:04:27 PM	BCl3 MFC set to  0.000000
10/28/2011	2:04:27 PM	PHl3 MFC set to  0.000000
10/28/2011	2:04:27 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:04:27 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:04:28 PM	Tube furnace set to 0
10/28/2011	2:04:58 PM	H2 valve closed
10/28/2011	2:04:58 PM	BCl3 valve closed
10/28/2011	2:04:58 PM	PH3 valve closed
10/28/2011	2:04:58 PM	SiCl4 pre valve closed
10/28/2011	2:04:58 PM	SiCl4 post valve closed
10/28/2011	2:04:58 PM	Bypass valve closed
10/28/2011	2:04:58 PM	Bubbler valve closed
10/28/2011	2:04:58 PM	Helium valve opened
10/28/2011	2:04:58 PM	Main Vac valve opened
10/28/2011	2:04:58 PM	Helium MFC set to  20.000000
10/28/2011	2:04:58 PM	H2 MFC set to  0.000000
10/28/2011	2:04:58 PM	BCl3 MFC set to  0.000000
10/28/2011	2:04:58 PM	PHl3 MFC set to  0.000000
10/28/2011	2:04:58 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:04:58 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:04:58 PM	Tube furnace set to 0
10/28/2011	2:05:28 PM	Helium valve closed
10/28/2011	2:05:28 PM	H2 valve closed
10/28/2011	2:05:28 PM	BCl3 valve closed
10/28/2011	2:05:28 PM	PH3 valve closed
10/28/2011	2:05:28 PM	SiCl4 pre valve closed
10/28/2011	2:05:28 PM	SiCl4 post valve closed
10/28/2011	2:05:28 PM	Bypass valve closed
10/28/2011	2:05:28 PM	Bubbler valve closed
10/28/2011	2:05:28 PM	Main Vac valve opened
10/28/2011	2:05:28 PM	Helium MFC set to  0.000000
10/28/2011	2:05:28 PM	H2 MFC set to  0.000000
10/28/2011	2:05:28 PM	BCl3 MFC set to  0.000000
10/28/2011	2:05:28 PM	PHl3 MFC set to  0.000000
10/28/2011	2:05:28 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:05:28 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:05:28 PM	Tube furnace set to 0
10/28/2011	2:05:58 PM	H2 valve closed
10/28/2011	2:05:58 PM	BCl3 valve closed
10/28/2011	2:05:58 PM	PH3 valve closed
10/28/2011	2:05:58 PM	SiCl4 pre valve closed
10/28/2011	2:05:58 PM	SiCl4 post valve closed
10/28/2011	2:05:58 PM	Bypass valve closed
10/28/2011	2:05:58 PM	Bubbler valve closed
10/28/2011	2:05:58 PM	Helium valve opened
10/28/2011	2:05:58 PM	Main Vac valve opened
10/28/2011	2:05:58 PM	Helium MFC set to  20.000000
10/28/2011	2:05:58 PM	H2 MFC set to  0.000000
10/28/2011	2:05:58 PM	BCl3 MFC set to  0.000000
10/28/2011	2:05:58 PM	PHl3 MFC set to  0.000000
10/28/2011	2:05:58 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:05:58 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:05:58 PM	Tube furnace set to 0
10/28/2011	2:06:28 PM	Helium valve closed
10/28/2011	2:06:28 PM	H2 valve closed
10/28/2011	2:06:28 PM	BCl3 valve closed
10/28/2011	2:06:28 PM	PH3 valve closed
10/28/2011	2:06:28 PM	SiCl4 pre valve closed
10/28/2011	2:06:28 PM	SiCl4 post valve closed
10/28/2011	2:06:28 PM	Bypass valve closed
10/28/2011	2:06:28 PM	Bubbler valve closed
10/28/2011	2:06:28 PM	Main Vac valve opened
10/28/2011	2:06:28 PM	Helium MFC set to  0.000000
10/28/2011	2:06:28 PM	H2 MFC set to  0.000000
10/28/2011	2:06:28 PM	BCl3 MFC set to  0.000000
10/28/2011	2:06:28 PM	PHl3 MFC set to  0.000000
10/28/2011	2:06:28 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:06:28 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:06:28 PM	Tube furnace set to 0
10/28/2011	2:06:58 PM	H2 valve closed
10/28/2011	2:06:58 PM	BCl3 valve closed
10/28/2011	2:06:58 PM	PH3 valve closed
10/28/2011	2:06:58 PM	SiCl4 pre valve closed
10/28/2011	2:06:58 PM	SiCl4 post valve closed
10/28/2011	2:06:58 PM	Bypass valve closed
10/28/2011	2:06:58 PM	Bubbler valve closed
10/28/2011	2:06:58 PM	Helium valve opened
10/28/2011	2:06:58 PM	Main Vac valve opened
10/28/2011	2:06:58 PM	Helium MFC set to  20.000000
10/28/2011	2:06:58 PM	H2 MFC set to  0.000000
10/28/2011	2:06:58 PM	BCl3 MFC set to  0.000000
10/28/2011	2:06:58 PM	PHl3 MFC set to  0.000000
10/28/2011	2:06:58 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:06:58 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:06:59 PM	Tube furnace set to 0
10/28/2011	2:07:29 PM	Helium valve closed
10/28/2011	2:07:29 PM	H2 valve closed
10/28/2011	2:07:29 PM	BCl3 valve closed
10/28/2011	2:07:29 PM	PH3 valve closed
10/28/2011	2:07:29 PM	SiCl4 pre valve closed
10/28/2011	2:07:29 PM	SiCl4 post valve closed
10/28/2011	2:07:29 PM	Bypass valve closed
10/28/2011	2:07:29 PM	Bubbler valve closed
10/28/2011	2:07:29 PM	Main Vac valve opened
10/28/2011	2:07:29 PM	Helium MFC set to  0.000000
10/28/2011	2:07:29 PM	H2 MFC set to  0.000000
10/28/2011	2:07:29 PM	BCl3 MFC set to  0.000000
10/28/2011	2:07:29 PM	PHl3 MFC set to  0.000000
10/28/2011	2:07:29 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:07:29 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:07:29 PM	Tube furnace set to 0
10/28/2011	2:07:59 PM	H2 valve closed
10/28/2011	2:07:59 PM	BCl3 valve closed
10/28/2011	2:07:59 PM	PH3 valve closed
10/28/2011	2:07:59 PM	SiCl4 pre valve closed
10/28/2011	2:07:59 PM	SiCl4 post valve closed
10/28/2011	2:07:59 PM	Bypass valve closed
10/28/2011	2:07:59 PM	Bubbler valve closed
10/28/2011	2:07:59 PM	Helium valve opened
10/28/2011	2:07:59 PM	Main Vac valve opened
10/28/2011	2:07:59 PM	Helium MFC set to  20.000000
10/28/2011	2:07:59 PM	H2 MFC set to  0.000000
10/28/2011	2:07:59 PM	BCl3 MFC set to  0.000000
10/28/2011	2:07:59 PM	PHl3 MFC set to  0.000000
10/28/2011	2:07:59 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:07:59 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:07:59 PM	Tube furnace set to 0
10/28/2011	2:08:29 PM	Helium valve closed
10/28/2011	2:08:29 PM	H2 valve closed
10/28/2011	2:08:29 PM	BCl3 valve closed
10/28/2011	2:08:29 PM	PH3 valve closed
10/28/2011	2:08:29 PM	SiCl4 pre valve closed
10/28/2011	2:08:29 PM	SiCl4 post valve closed
10/28/2011	2:08:29 PM	Bypass valve closed
10/28/2011	2:08:29 PM	Bubbler valve closed
10/28/2011	2:08:29 PM	Main Vac valve opened
10/28/2011	2:08:29 PM	Helium MFC set to  0.000000
10/28/2011	2:08:29 PM	H2 MFC set to  0.000000
10/28/2011	2:08:29 PM	BCl3 MFC set to  0.000000
10/28/2011	2:08:29 PM	PHl3 MFC set to  0.000000
10/28/2011	2:08:29 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:08:29 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:08:29 PM	Tube furnace set to 0
10/28/2011	2:08:59 PM	H2 valve closed
10/28/2011	2:08:59 PM	BCl3 valve closed
10/28/2011	2:08:59 PM	PH3 valve closed
10/28/2011	2:08:59 PM	SiCl4 pre valve closed
10/28/2011	2:08:59 PM	SiCl4 post valve closed
10/28/2011	2:08:59 PM	Bypass valve closed
10/28/2011	2:08:59 PM	Bubbler valve closed
10/28/2011	2:08:59 PM	Helium valve opened
10/28/2011	2:08:59 PM	Main Vac valve opened
10/28/2011	2:08:59 PM	Helium MFC set to  20.000000
10/28/2011	2:08:59 PM	H2 MFC set to  0.000000
10/28/2011	2:08:59 PM	BCl3 MFC set to  0.000000
10/28/2011	2:08:59 PM	PHl3 MFC set to  0.000000
10/28/2011	2:08:59 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:08:59 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:09:00 PM	Tube furnace set to 0
10/28/2011	2:09:30 PM	Helium valve closed
10/28/2011	2:09:30 PM	H2 valve closed
10/28/2011	2:09:30 PM	BCl3 valve closed
10/28/2011	2:09:30 PM	PH3 valve closed
10/28/2011	2:09:30 PM	SiCl4 pre valve closed
10/28/2011	2:09:30 PM	SiCl4 post valve closed
10/28/2011	2:09:30 PM	Bypass valve closed
10/28/2011	2:09:30 PM	Bubbler valve closed
10/28/2011	2:09:30 PM	Main Vac valve opened
10/28/2011	2:09:30 PM	Helium MFC set to  0.000000
10/28/2011	2:09:30 PM	H2 MFC set to  0.000000
10/28/2011	2:09:30 PM	BCl3 MFC set to  0.000000
10/28/2011	2:09:30 PM	PHl3 MFC set to  0.000000
10/28/2011	2:09:30 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:09:30 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:09:30 PM	Tube furnace set to 0
10/28/2011	2:09:31 PM	Run finished at 2:09 PM
10/28/2011	2:09:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/28/2011	2:31:38 PM	Recipe started at 2:31 PM
10/28/2011	2:31:38 PM	Helium valve closed
10/28/2011	2:31:38 PM	H2 valve closed
10/28/2011	2:31:38 PM	BCl3 valve closed
10/28/2011	2:31:38 PM	PH3 valve closed
10/28/2011	2:31:38 PM	SiCl4 pre valve closed
10/28/2011	2:31:38 PM	SiCl4 post valve closed
10/28/2011	2:31:38 PM	Main Vac valve closed
10/28/2011	2:31:38 PM	Bypass valve closed
10/28/2011	2:31:38 PM	Bubbler valve closed
10/28/2011	2:31:38 PM	Helium MFC set to  0.000000
10/28/2011	2:31:38 PM	H2 MFC set to  0.000000
10/28/2011	2:31:38 PM	BCl3 MFC set to  0.000000
10/28/2011	2:31:38 PM	PHl3 MFC set to  0.000000
10/28/2011	2:31:38 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:31:38 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:31:38 PM	Tube furnace set to 0
10/28/2011	2:31:41 PM	Helium valve closed
10/28/2011	2:31:41 PM	BCl3 valve closed
10/28/2011	2:31:41 PM	PH3 valve closed
10/28/2011	2:31:41 PM	SiCl4 pre valve closed
10/28/2011	2:31:41 PM	SiCl4 post valve closed
10/28/2011	2:31:41 PM	Main Vac valve closed
10/28/2011	2:31:41 PM	Bypass valve closed
10/28/2011	2:31:41 PM	Bubbler valve closed
10/28/2011	2:31:41 PM	H2 valve opened
10/28/2011	2:31:41 PM	Helium MFC set to  0.000000
10/28/2011	2:31:41 PM	H2 MFC set to  500.000000
10/28/2011	2:31:41 PM	BCl3 MFC set to  0.000000
10/28/2011	2:31:41 PM	PHl3 MFC set to  0.000000
10/28/2011	2:31:41 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:31:41 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:31:41 PM	Tube furnace set to 0
10/28/2011	2:32:47 PM	Helium valve closed
10/28/2011	2:32:47 PM	BCl3 valve closed
10/28/2011	2:32:47 PM	PH3 valve closed
10/28/2011	2:32:47 PM	SiCl4 pre valve closed
10/28/2011	2:32:47 PM	SiCl4 post valve closed
10/28/2011	2:32:47 PM	Main Vac valve closed
10/28/2011	2:32:47 PM	Bypass valve closed
10/28/2011	2:32:47 PM	H2 valve opened
10/28/2011	2:32:47 PM	Bubbler valve opened
10/28/2011	2:32:47 PM	Helium MFC set to  0.000000
10/28/2011	2:32:47 PM	H2 MFC set to  500.000000
10/28/2011	2:32:47 PM	BCl3 MFC set to  0.000000
10/28/2011	2:32:47 PM	PHl3 MFC set to  0.000000
10/28/2011	2:32:47 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:32:47 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:32:47 PM	Tube furnace set to 0
10/28/2011	2:32:48 PM	Helium valve closed
10/28/2011	2:32:48 PM	BCl3 valve closed
10/28/2011	2:32:48 PM	PH3 valve closed
10/28/2011	2:32:48 PM	SiCl4 pre valve closed
10/28/2011	2:32:48 PM	SiCl4 post valve closed
10/28/2011	2:32:48 PM	Main Vac valve closed
10/28/2011	2:32:48 PM	Bypass valve closed
10/28/2011	2:32:48 PM	H2 valve opened
10/28/2011	2:32:48 PM	Bubbler valve opened
10/28/2011	2:32:48 PM	Helium MFC set to  0.000000
10/28/2011	2:32:48 PM	H2 MFC set to  500.000000
10/28/2011	2:32:48 PM	BCl3 MFC set to  0.000000
10/28/2011	2:32:48 PM	PHl3 MFC set to  0.000000
10/28/2011	2:32:48 PM	SiCl4 MFC set to  0.000000
10/28/2011	2:32:48 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:32:48 PM	Tube furnace set to 1000
10/28/2011	2:52:48 PM	Helium valve closed
10/28/2011	2:52:48 PM	PH3 valve closed
10/28/2011	2:52:48 PM	Main Vac valve closed
10/28/2011	2:52:48 PM	Bypass valve closed
10/28/2011	2:52:48 PM	H2 valve opened
10/28/2011	2:52:48 PM	BCl3 valve opened
10/28/2011	2:52:48 PM	SiCl4 pre valve opened
10/28/2011	2:52:48 PM	SiCl4 post valve opened
10/28/2011	2:52:48 PM	Bubbler valve opened
10/28/2011	2:52:48 PM	Helium MFC set to  0.000000
10/28/2011	2:52:48 PM	H2 MFC set to  500.000000
10/28/2011	2:52:48 PM	BCl3 MFC set to  2.000000
10/28/2011	2:52:48 PM	PHl3 MFC set to  0.000000
10/28/2011	2:52:48 PM	SiCl4 MFC set to  50.000000
10/28/2011	2:52:48 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	2:52:48 PM	Tube furnace set to 1000
10/28/2011	3:07:48 PM	Helium valve closed
10/28/2011	3:07:48 PM	BCl3 valve closed
10/28/2011	3:07:48 PM	PH3 valve closed
10/28/2011	3:07:48 PM	SiCl4 pre valve closed
10/28/2011	3:07:48 PM	SiCl4 post valve closed
10/28/2011	3:07:48 PM	Main Vac valve closed
10/28/2011	3:07:48 PM	Bypass valve closed
10/28/2011	3:07:48 PM	H2 valve opened
10/28/2011	3:07:48 PM	Bubbler valve opened
10/28/2011	3:07:48 PM	Helium MFC set to  0.000000
10/28/2011	3:07:48 PM	H2 MFC set to  500.000000
10/28/2011	3:07:48 PM	BCl3 MFC set to  0.000000
10/28/2011	3:07:48 PM	PHl3 MFC set to  0.000000
10/28/2011	3:07:48 PM	SiCl4 MFC set to  0.000000
10/28/2011	3:07:48 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	3:07:48 PM	Tube furnace set to 750
10/28/2011	3:12:48 PM	H2 valve closed
10/28/2011	3:12:48 PM	BCl3 valve closed
10/28/2011	3:12:48 PM	PH3 valve closed
10/28/2011	3:12:48 PM	SiCl4 pre valve closed
10/28/2011	3:12:48 PM	SiCl4 post valve closed
10/28/2011	3:12:48 PM	Main Vac valve closed
10/28/2011	3:12:48 PM	Bypass valve closed
10/28/2011	3:12:48 PM	Helium valve opened
10/28/2011	3:12:48 PM	Bubbler valve opened
10/28/2011	3:12:48 PM	Helium MFC set to  500.000000
10/28/2011	3:12:48 PM	H2 MFC set to  0.000000
10/28/2011	3:12:48 PM	BCl3 MFC set to  0.000000
10/28/2011	3:12:48 PM	PHl3 MFC set to  0.000000
10/28/2011	3:12:48 PM	SiCl4 MFC set to  0.000000
10/28/2011	3:12:48 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	3:12:48 PM	Tube furnace set to 0
10/28/2011	3:32:48 PM	Helium valve closed
10/28/2011	3:32:48 PM	H2 valve closed
10/28/2011	3:32:48 PM	BCl3 valve closed
10/28/2011	3:32:48 PM	PH3 valve closed
10/28/2011	3:32:48 PM	SiCl4 pre valve closed
10/28/2011	3:32:48 PM	SiCl4 post valve closed
10/28/2011	3:32:48 PM	Main Vac valve closed
10/28/2011	3:32:48 PM	Bypass valve closed
10/28/2011	3:32:48 PM	Bubbler valve closed
10/28/2011	3:32:48 PM	Helium MFC set to  0.000000
10/28/2011	3:32:48 PM	H2 MFC set to  0.000000
10/28/2011	3:32:48 PM	BCl3 MFC set to  0.000000
10/28/2011	3:32:48 PM	PHl3 MFC set to  0.000000
10/28/2011	3:32:48 PM	SiCl4 MFC set to  0.000000
10/28/2011	3:32:48 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	3:32:49 PM	Tube furnace set to 0
10/28/2011	3:32:50 PM	Run finished at 3:32 PM
10/28/2011	4:11:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	4:11:03 PM	Recipe started at 4:11 PM
10/28/2011	4:11:03 PM	Helium valve closed
10/28/2011	4:11:03 PM	H2 valve closed
10/28/2011	4:11:03 PM	BCl3 valve closed
10/28/2011	4:11:03 PM	PH3 valve closed
10/28/2011	4:11:03 PM	SiCl4 pre valve closed
10/28/2011	4:11:03 PM	SiCl4 post valve closed
10/28/2011	4:11:03 PM	Main Vac valve closed
10/28/2011	4:11:03 PM	Bypass valve closed
10/28/2011	4:11:03 PM	Bubbler valve closed
10/28/2011	4:11:03 PM	Helium MFC set to  0.000000
10/28/2011	4:11:03 PM	H2 MFC set to  0.000000
10/28/2011	4:11:03 PM	BCl3 MFC set to  0.000000
10/28/2011	4:11:03 PM	PHl3 MFC set to  0.000000
10/28/2011	4:11:03 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:11:03 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:11:03 PM	Tube furnace set to 0
10/28/2011	4:11:06 PM	H2 valve closed
10/28/2011	4:11:06 PM	BCl3 valve closed
10/28/2011	4:11:06 PM	PH3 valve closed
10/28/2011	4:11:06 PM	SiCl4 pre valve closed
10/28/2011	4:11:06 PM	SiCl4 post valve closed
10/28/2011	4:11:06 PM	Main Vac valve closed
10/28/2011	4:11:06 PM	Bypass valve closed
10/28/2011	4:11:06 PM	Bubbler valve closed
10/28/2011	4:11:06 PM	Helium valve opened
10/28/2011	4:11:06 PM	Helium MFC set to  500.000000
10/28/2011	4:11:06 PM	H2 MFC set to  0.000000
10/28/2011	4:11:06 PM	BCl3 MFC set to  0.000000
10/28/2011	4:11:06 PM	PHl3 MFC set to  0.000000
10/28/2011	4:11:06 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:11:06 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:11:06 PM	Tube furnace set to 0
10/28/2011	4:11:10 PM	Helium valve closed
10/28/2011	4:11:10 PM	H2 valve closed
10/28/2011	4:11:10 PM	BCl3 valve closed
10/28/2011	4:11:10 PM	PH3 valve closed
10/28/2011	4:11:10 PM	SiCl4 pre valve closed
10/28/2011	4:11:10 PM	SiCl4 post valve closed
10/28/2011	4:11:10 PM	Main Vac valve closed
10/28/2011	4:11:10 PM	Bypass valve closed
10/28/2011	4:11:10 PM	Bubbler valve closed
10/28/2011	4:11:10 PM	Helium MFC set to  0.000000
10/28/2011	4:11:10 PM	H2 MFC set to  0.000000
10/28/2011	4:11:10 PM	BCl3 MFC set to  0.000000
10/28/2011	4:11:10 PM	PHl3 MFC set to  0.000000
10/28/2011	4:11:10 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:11:10 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:11:10 PM	Tube furnace set to 0
10/28/2011	4:11:11 PM	Run finished at 4:11 PM
10/28/2011	4:11:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	4:18:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/28/2011	4:18:56 PM	Recipe started at 4:18 PM
10/28/2011	4:18:56 PM	Helium valve closed
10/28/2011	4:18:56 PM	H2 valve closed
10/28/2011	4:18:56 PM	BCl3 valve closed
10/28/2011	4:18:56 PM	PH3 valve closed
10/28/2011	4:18:56 PM	SiCl4 pre valve closed
10/28/2011	4:18:56 PM	SiCl4 post valve closed
10/28/2011	4:18:56 PM	Main Vac valve closed
10/28/2011	4:18:56 PM	Bubbler valve closed
10/28/2011	4:18:56 PM	Bypass valve opened
10/28/2011	4:18:56 PM	Helium MFC set to  0.000000
10/28/2011	4:18:56 PM	H2 MFC set to  0.000000
10/28/2011	4:18:56 PM	BCl3 MFC set to  0.000000
10/28/2011	4:18:56 PM	PHl3 MFC set to  0.000000
10/28/2011	4:18:56 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:18:56 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:18:57 PM	Tube furnace set to 0
10/28/2011	4:20:03 PM	Helium valve closed
10/28/2011	4:20:03 PM	H2 valve closed
10/28/2011	4:20:03 PM	BCl3 valve closed
10/28/2011	4:20:03 PM	PH3 valve closed
10/28/2011	4:20:03 PM	SiCl4 pre valve closed
10/28/2011	4:20:03 PM	SiCl4 post valve closed
10/28/2011	4:20:03 PM	Main Vac valve closed
10/28/2011	4:20:03 PM	Bubbler valve closed
10/28/2011	4:20:03 PM	Bypass valve opened
10/28/2011	4:20:03 PM	Helium MFC set to  0.000000
10/28/2011	4:20:03 PM	H2 MFC set to  0.000000
10/28/2011	4:20:03 PM	BCl3 MFC set to  0.000000
10/28/2011	4:20:03 PM	PHl3 MFC set to  0.000000
10/28/2011	4:20:03 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:20:03 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:20:03 PM	Tube furnace set to 0
10/28/2011	4:20:33 PM	Helium valve closed
10/28/2011	4:20:33 PM	H2 valve closed
10/28/2011	4:20:33 PM	BCl3 valve closed
10/28/2011	4:20:33 PM	PH3 valve closed
10/28/2011	4:20:33 PM	SiCl4 pre valve closed
10/28/2011	4:20:33 PM	SiCl4 post valve closed
10/28/2011	4:20:33 PM	Bypass valve closed
10/28/2011	4:20:33 PM	Bubbler valve closed
10/28/2011	4:20:33 PM	Main Vac valve opened
10/28/2011	4:20:33 PM	Helium MFC set to  0.000000
10/28/2011	4:20:33 PM	H2 MFC set to  0.000000
10/28/2011	4:20:33 PM	BCl3 MFC set to  0.000000
10/28/2011	4:20:33 PM	PHl3 MFC set to  0.000000
10/28/2011	4:20:33 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:20:33 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:20:33 PM	Tube furnace set to 0
10/28/2011	4:21:03 PM	H2 valve closed
10/28/2011	4:21:03 PM	BCl3 valve closed
10/28/2011	4:21:03 PM	PH3 valve closed
10/28/2011	4:21:03 PM	SiCl4 pre valve closed
10/28/2011	4:21:03 PM	SiCl4 post valve closed
10/28/2011	4:21:03 PM	Bypass valve closed
10/28/2011	4:21:03 PM	Bubbler valve closed
10/28/2011	4:21:03 PM	Helium valve opened
10/28/2011	4:21:03 PM	Main Vac valve opened
10/28/2011	4:21:03 PM	Helium MFC set to  20.000000
10/28/2011	4:21:03 PM	H2 MFC set to  0.000000
10/28/2011	4:21:03 PM	BCl3 MFC set to  0.000000
10/28/2011	4:21:03 PM	PHl3 MFC set to  0.000000
10/28/2011	4:21:03 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:21:03 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:21:04 PM	Tube furnace set to 0
10/28/2011	4:21:34 PM	Helium valve closed
10/28/2011	4:21:34 PM	H2 valve closed
10/28/2011	4:21:34 PM	BCl3 valve closed
10/28/2011	4:21:34 PM	PH3 valve closed
10/28/2011	4:21:34 PM	SiCl4 pre valve closed
10/28/2011	4:21:34 PM	SiCl4 post valve closed
10/28/2011	4:21:34 PM	Bypass valve closed
10/28/2011	4:21:34 PM	Bubbler valve closed
10/28/2011	4:21:34 PM	Main Vac valve opened
10/28/2011	4:21:34 PM	Helium MFC set to  0.000000
10/28/2011	4:21:34 PM	H2 MFC set to  0.000000
10/28/2011	4:21:34 PM	BCl3 MFC set to  0.000000
10/28/2011	4:21:34 PM	PHl3 MFC set to  0.000000
10/28/2011	4:21:34 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:21:34 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:21:34 PM	Tube furnace set to 0
10/28/2011	4:22:04 PM	H2 valve closed
10/28/2011	4:22:04 PM	BCl3 valve closed
10/28/2011	4:22:04 PM	PH3 valve closed
10/28/2011	4:22:04 PM	SiCl4 pre valve closed
10/28/2011	4:22:04 PM	SiCl4 post valve closed
10/28/2011	4:22:04 PM	Bypass valve closed
10/28/2011	4:22:04 PM	Bubbler valve closed
10/28/2011	4:22:04 PM	Helium valve opened
10/28/2011	4:22:04 PM	Main Vac valve opened
10/28/2011	4:22:04 PM	Helium MFC set to  20.000000
10/28/2011	4:22:04 PM	H2 MFC set to  0.000000
10/28/2011	4:22:04 PM	BCl3 MFC set to  0.000000
10/28/2011	4:22:04 PM	PHl3 MFC set to  0.000000
10/28/2011	4:22:04 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:22:04 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:22:04 PM	Tube furnace set to 0
10/28/2011	4:22:34 PM	Helium valve closed
10/28/2011	4:22:34 PM	H2 valve closed
10/28/2011	4:22:34 PM	BCl3 valve closed
10/28/2011	4:22:34 PM	PH3 valve closed
10/28/2011	4:22:34 PM	SiCl4 pre valve closed
10/28/2011	4:22:34 PM	SiCl4 post valve closed
10/28/2011	4:22:34 PM	Bypass valve closed
10/28/2011	4:22:34 PM	Bubbler valve closed
10/28/2011	4:22:34 PM	Main Vac valve opened
10/28/2011	4:22:34 PM	Helium MFC set to  0.000000
10/28/2011	4:22:34 PM	H2 MFC set to  0.000000
10/28/2011	4:22:34 PM	BCl3 MFC set to  0.000000
10/28/2011	4:22:34 PM	PHl3 MFC set to  0.000000
10/28/2011	4:22:34 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:22:34 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:22:34 PM	Tube furnace set to 0
10/28/2011	4:23:04 PM	H2 valve closed
10/28/2011	4:23:04 PM	BCl3 valve closed
10/28/2011	4:23:04 PM	PH3 valve closed
10/28/2011	4:23:04 PM	SiCl4 pre valve closed
10/28/2011	4:23:04 PM	SiCl4 post valve closed
10/28/2011	4:23:04 PM	Bypass valve closed
10/28/2011	4:23:04 PM	Bubbler valve closed
10/28/2011	4:23:04 PM	Helium valve opened
10/28/2011	4:23:04 PM	Main Vac valve opened
10/28/2011	4:23:04 PM	Helium MFC set to  20.000000
10/28/2011	4:23:04 PM	H2 MFC set to  0.000000
10/28/2011	4:23:04 PM	BCl3 MFC set to  0.000000
10/28/2011	4:23:04 PM	PHl3 MFC set to  0.000000
10/28/2011	4:23:04 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:23:04 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:23:04 PM	Tube furnace set to 0
10/28/2011	4:23:34 PM	Helium valve closed
10/28/2011	4:23:34 PM	H2 valve closed
10/28/2011	4:23:34 PM	BCl3 valve closed
10/28/2011	4:23:34 PM	PH3 valve closed
10/28/2011	4:23:34 PM	SiCl4 pre valve closed
10/28/2011	4:23:34 PM	SiCl4 post valve closed
10/28/2011	4:23:34 PM	Bypass valve closed
10/28/2011	4:23:34 PM	Bubbler valve closed
10/28/2011	4:23:34 PM	Main Vac valve opened
10/28/2011	4:23:34 PM	Helium MFC set to  0.000000
10/28/2011	4:23:34 PM	H2 MFC set to  0.000000
10/28/2011	4:23:34 PM	BCl3 MFC set to  0.000000
10/28/2011	4:23:34 PM	PHl3 MFC set to  0.000000
10/28/2011	4:23:34 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:23:34 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:23:35 PM	Tube furnace set to 0
10/28/2011	4:24:05 PM	H2 valve closed
10/28/2011	4:24:05 PM	BCl3 valve closed
10/28/2011	4:24:05 PM	PH3 valve closed
10/28/2011	4:24:05 PM	SiCl4 pre valve closed
10/28/2011	4:24:05 PM	SiCl4 post valve closed
10/28/2011	4:24:05 PM	Bypass valve closed
10/28/2011	4:24:05 PM	Bubbler valve closed
10/28/2011	4:24:05 PM	Helium valve opened
10/28/2011	4:24:05 PM	Main Vac valve opened
10/28/2011	4:24:05 PM	Helium MFC set to  20.000000
10/28/2011	4:24:05 PM	H2 MFC set to  0.000000
10/28/2011	4:24:05 PM	BCl3 MFC set to  0.000000
10/28/2011	4:24:05 PM	PHl3 MFC set to  0.000000
10/28/2011	4:24:05 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:24:05 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:24:05 PM	Tube furnace set to 0
10/28/2011	4:24:35 PM	Helium valve closed
10/28/2011	4:24:35 PM	H2 valve closed
10/28/2011	4:24:35 PM	BCl3 valve closed
10/28/2011	4:24:35 PM	PH3 valve closed
10/28/2011	4:24:35 PM	SiCl4 pre valve closed
10/28/2011	4:24:35 PM	SiCl4 post valve closed
10/28/2011	4:24:35 PM	Bypass valve closed
10/28/2011	4:24:35 PM	Bubbler valve closed
10/28/2011	4:24:35 PM	Main Vac valve opened
10/28/2011	4:24:35 PM	Helium MFC set to  0.000000
10/28/2011	4:24:35 PM	H2 MFC set to  0.000000
10/28/2011	4:24:35 PM	BCl3 MFC set to  0.000000
10/28/2011	4:24:35 PM	PHl3 MFC set to  0.000000
10/28/2011	4:24:35 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:24:35 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:24:35 PM	Tube furnace set to 0
10/28/2011	4:25:05 PM	H2 valve closed
10/28/2011	4:25:05 PM	BCl3 valve closed
10/28/2011	4:25:05 PM	PH3 valve closed
10/28/2011	4:25:05 PM	SiCl4 pre valve closed
10/28/2011	4:25:05 PM	SiCl4 post valve closed
10/28/2011	4:25:05 PM	Bypass valve closed
10/28/2011	4:25:05 PM	Bubbler valve closed
10/28/2011	4:25:05 PM	Helium valve opened
10/28/2011	4:25:05 PM	Main Vac valve opened
10/28/2011	4:25:05 PM	Helium MFC set to  20.000000
10/28/2011	4:25:05 PM	H2 MFC set to  0.000000
10/28/2011	4:25:05 PM	BCl3 MFC set to  0.000000
10/28/2011	4:25:05 PM	PHl3 MFC set to  0.000000
10/28/2011	4:25:05 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:25:05 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:25:05 PM	Tube furnace set to 0
10/28/2011	4:25:35 PM	Helium valve closed
10/28/2011	4:25:35 PM	H2 valve closed
10/28/2011	4:25:35 PM	BCl3 valve closed
10/28/2011	4:25:35 PM	PH3 valve closed
10/28/2011	4:25:35 PM	SiCl4 pre valve closed
10/28/2011	4:25:35 PM	SiCl4 post valve closed
10/28/2011	4:25:35 PM	Bypass valve closed
10/28/2011	4:25:35 PM	Bubbler valve closed
10/28/2011	4:25:35 PM	Main Vac valve opened
10/28/2011	4:25:35 PM	Helium MFC set to  0.000000
10/28/2011	4:25:35 PM	H2 MFC set to  0.000000
10/28/2011	4:25:35 PM	BCl3 MFC set to  0.000000
10/28/2011	4:25:35 PM	PHl3 MFC set to  0.000000
10/28/2011	4:25:35 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:25:35 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:25:35 PM	Tube furnace set to 0
10/28/2011	4:26:05 PM	H2 valve closed
10/28/2011	4:26:05 PM	BCl3 valve closed
10/28/2011	4:26:05 PM	PH3 valve closed
10/28/2011	4:26:05 PM	SiCl4 pre valve closed
10/28/2011	4:26:05 PM	SiCl4 post valve closed
10/28/2011	4:26:05 PM	Bypass valve closed
10/28/2011	4:26:05 PM	Bubbler valve closed
10/28/2011	4:26:05 PM	Helium valve opened
10/28/2011	4:26:05 PM	Main Vac valve opened
10/28/2011	4:26:05 PM	Helium MFC set to  20.000000
10/28/2011	4:26:05 PM	H2 MFC set to  0.000000
10/28/2011	4:26:05 PM	BCl3 MFC set to  0.000000
10/28/2011	4:26:05 PM	PHl3 MFC set to  0.000000
10/28/2011	4:26:05 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:26:05 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:26:06 PM	Tube furnace set to 0
10/28/2011	4:26:36 PM	Helium valve closed
10/28/2011	4:26:36 PM	H2 valve closed
10/28/2011	4:26:36 PM	BCl3 valve closed
10/28/2011	4:26:36 PM	PH3 valve closed
10/28/2011	4:26:36 PM	SiCl4 pre valve closed
10/28/2011	4:26:36 PM	SiCl4 post valve closed
10/28/2011	4:26:36 PM	Bypass valve closed
10/28/2011	4:26:36 PM	Bubbler valve closed
10/28/2011	4:26:36 PM	Main Vac valve opened
10/28/2011	4:26:36 PM	Helium MFC set to  0.000000
10/28/2011	4:26:36 PM	H2 MFC set to  0.000000
10/28/2011	4:26:36 PM	BCl3 MFC set to  0.000000
10/28/2011	4:26:36 PM	PHl3 MFC set to  0.000000
10/28/2011	4:26:36 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:26:36 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:26:36 PM	Tube furnace set to 0
10/28/2011	4:27:06 PM	H2 valve closed
10/28/2011	4:27:06 PM	BCl3 valve closed
10/28/2011	4:27:06 PM	PH3 valve closed
10/28/2011	4:27:06 PM	SiCl4 pre valve closed
10/28/2011	4:27:06 PM	SiCl4 post valve closed
10/28/2011	4:27:06 PM	Bypass valve closed
10/28/2011	4:27:06 PM	Bubbler valve closed
10/28/2011	4:27:06 PM	Helium valve opened
10/28/2011	4:27:06 PM	Main Vac valve opened
10/28/2011	4:27:06 PM	Helium MFC set to  20.000000
10/28/2011	4:27:06 PM	H2 MFC set to  0.000000
10/28/2011	4:27:06 PM	BCl3 MFC set to  0.000000
10/28/2011	4:27:06 PM	PHl3 MFC set to  0.000000
10/28/2011	4:27:06 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:27:06 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:27:06 PM	Tube furnace set to 0
10/28/2011	4:27:36 PM	Helium valve closed
10/28/2011	4:27:36 PM	H2 valve closed
10/28/2011	4:27:36 PM	BCl3 valve closed
10/28/2011	4:27:36 PM	PH3 valve closed
10/28/2011	4:27:36 PM	SiCl4 pre valve closed
10/28/2011	4:27:36 PM	SiCl4 post valve closed
10/28/2011	4:27:36 PM	Bypass valve closed
10/28/2011	4:27:36 PM	Bubbler valve closed
10/28/2011	4:27:36 PM	Main Vac valve opened
10/28/2011	4:27:36 PM	Helium MFC set to  0.000000
10/28/2011	4:27:36 PM	H2 MFC set to  0.000000
10/28/2011	4:27:36 PM	BCl3 MFC set to  0.000000
10/28/2011	4:27:36 PM	PHl3 MFC set to  0.000000
10/28/2011	4:27:36 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:27:36 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:27:36 PM	Tube furnace set to 0
10/28/2011	4:28:06 PM	H2 valve closed
10/28/2011	4:28:06 PM	BCl3 valve closed
10/28/2011	4:28:06 PM	PH3 valve closed
10/28/2011	4:28:06 PM	SiCl4 pre valve closed
10/28/2011	4:28:06 PM	SiCl4 post valve closed
10/28/2011	4:28:06 PM	Bypass valve closed
10/28/2011	4:28:06 PM	Bubbler valve closed
10/28/2011	4:28:06 PM	Helium valve opened
10/28/2011	4:28:06 PM	Main Vac valve opened
10/28/2011	4:28:06 PM	Helium MFC set to  20.000000
10/28/2011	4:28:06 PM	H2 MFC set to  0.000000
10/28/2011	4:28:06 PM	BCl3 MFC set to  0.000000
10/28/2011	4:28:06 PM	PHl3 MFC set to  0.000000
10/28/2011	4:28:06 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:28:06 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:28:06 PM	Tube furnace set to 0
10/28/2011	4:28:36 PM	Helium valve closed
10/28/2011	4:28:36 PM	H2 valve closed
10/28/2011	4:28:36 PM	BCl3 valve closed
10/28/2011	4:28:36 PM	PH3 valve closed
10/28/2011	4:28:36 PM	SiCl4 pre valve closed
10/28/2011	4:28:36 PM	SiCl4 post valve closed
10/28/2011	4:28:36 PM	Bypass valve closed
10/28/2011	4:28:36 PM	Bubbler valve closed
10/28/2011	4:28:36 PM	Main Vac valve opened
10/28/2011	4:28:36 PM	Helium MFC set to  0.000000
10/28/2011	4:28:36 PM	H2 MFC set to  0.000000
10/28/2011	4:28:36 PM	BCl3 MFC set to  0.000000
10/28/2011	4:28:36 PM	PHl3 MFC set to  0.000000
10/28/2011	4:28:36 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:28:36 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:28:37 PM	Tube furnace set to 0
10/28/2011	4:29:07 PM	H2 valve closed
10/28/2011	4:29:07 PM	BCl3 valve closed
10/28/2011	4:29:07 PM	PH3 valve closed
10/28/2011	4:29:07 PM	SiCl4 pre valve closed
10/28/2011	4:29:07 PM	SiCl4 post valve closed
10/28/2011	4:29:07 PM	Bypass valve closed
10/28/2011	4:29:07 PM	Bubbler valve closed
10/28/2011	4:29:07 PM	Helium valve opened
10/28/2011	4:29:07 PM	Main Vac valve opened
10/28/2011	4:29:07 PM	Helium MFC set to  20.000000
10/28/2011	4:29:07 PM	H2 MFC set to  0.000000
10/28/2011	4:29:07 PM	BCl3 MFC set to  0.000000
10/28/2011	4:29:07 PM	PHl3 MFC set to  0.000000
10/28/2011	4:29:07 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:29:07 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:29:07 PM	Tube furnace set to 0
10/28/2011	4:29:37 PM	Helium valve closed
10/28/2011	4:29:37 PM	H2 valve closed
10/28/2011	4:29:37 PM	BCl3 valve closed
10/28/2011	4:29:37 PM	PH3 valve closed
10/28/2011	4:29:37 PM	SiCl4 pre valve closed
10/28/2011	4:29:37 PM	SiCl4 post valve closed
10/28/2011	4:29:37 PM	Bypass valve closed
10/28/2011	4:29:37 PM	Bubbler valve closed
10/28/2011	4:29:37 PM	Main Vac valve opened
10/28/2011	4:29:37 PM	Helium MFC set to  0.000000
10/28/2011	4:29:37 PM	H2 MFC set to  0.000000
10/28/2011	4:29:37 PM	BCl3 MFC set to  0.000000
10/28/2011	4:29:37 PM	PHl3 MFC set to  0.000000
10/28/2011	4:29:37 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:29:37 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:29:37 PM	Tube furnace set to 0
10/28/2011	4:30:07 PM	H2 valve closed
10/28/2011	4:30:07 PM	BCl3 valve closed
10/28/2011	4:30:07 PM	PH3 valve closed
10/28/2011	4:30:07 PM	SiCl4 pre valve closed
10/28/2011	4:30:07 PM	SiCl4 post valve closed
10/28/2011	4:30:07 PM	Bypass valve closed
10/28/2011	4:30:07 PM	Bubbler valve closed
10/28/2011	4:30:07 PM	Helium valve opened
10/28/2011	4:30:07 PM	Main Vac valve opened
10/28/2011	4:30:07 PM	Helium MFC set to  20.000000
10/28/2011	4:30:07 PM	H2 MFC set to  0.000000
10/28/2011	4:30:07 PM	BCl3 MFC set to  0.000000
10/28/2011	4:30:07 PM	PHl3 MFC set to  0.000000
10/28/2011	4:30:07 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:30:07 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:30:07 PM	Tube furnace set to 0
10/28/2011	4:30:37 PM	Helium valve closed
10/28/2011	4:30:37 PM	H2 valve closed
10/28/2011	4:30:37 PM	BCl3 valve closed
10/28/2011	4:30:37 PM	PH3 valve closed
10/28/2011	4:30:37 PM	SiCl4 pre valve closed
10/28/2011	4:30:37 PM	SiCl4 post valve closed
10/28/2011	4:30:37 PM	Bypass valve closed
10/28/2011	4:30:37 PM	Bubbler valve closed
10/28/2011	4:30:37 PM	Main Vac valve opened
10/28/2011	4:30:37 PM	Helium MFC set to  0.000000
10/28/2011	4:30:37 PM	H2 MFC set to  0.000000
10/28/2011	4:30:37 PM	BCl3 MFC set to  0.000000
10/28/2011	4:30:37 PM	PHl3 MFC set to  0.000000
10/28/2011	4:30:37 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:30:37 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:30:37 PM	Tube furnace set to 0
10/28/2011	4:30:38 PM	Run finished at 4:30 PM
10/28/2011	4:30:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/28/2011	4:48:45 PM	Recipe started at 4:48 PM
10/28/2011	4:48:45 PM	Helium valve closed
10/28/2011	4:48:45 PM	H2 valve closed
10/28/2011	4:48:45 PM	BCl3 valve closed
10/28/2011	4:48:45 PM	PH3 valve closed
10/28/2011	4:48:45 PM	SiCl4 pre valve closed
10/28/2011	4:48:45 PM	SiCl4 post valve closed
10/28/2011	4:48:45 PM	Main Vac valve closed
10/28/2011	4:48:45 PM	Bypass valve closed
10/28/2011	4:48:45 PM	Bubbler valve closed
10/28/2011	4:48:45 PM	Helium MFC set to  0.000000
10/28/2011	4:48:45 PM	H2 MFC set to  0.000000
10/28/2011	4:48:45 PM	BCl3 MFC set to  0.000000
10/28/2011	4:48:45 PM	PHl3 MFC set to  0.000000
10/28/2011	4:48:45 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:48:45 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:48:45 PM	Tube furnace set to 0
10/28/2011	4:48:48 PM	Helium valve closed
10/28/2011	4:48:48 PM	BCl3 valve closed
10/28/2011	4:48:48 PM	PH3 valve closed
10/28/2011	4:48:48 PM	SiCl4 pre valve closed
10/28/2011	4:48:48 PM	SiCl4 post valve closed
10/28/2011	4:48:48 PM	Main Vac valve closed
10/28/2011	4:48:48 PM	Bypass valve closed
10/28/2011	4:48:48 PM	Bubbler valve closed
10/28/2011	4:48:48 PM	H2 valve opened
10/28/2011	4:48:48 PM	Helium MFC set to  0.000000
10/28/2011	4:48:48 PM	H2 MFC set to  500.000000
10/28/2011	4:48:48 PM	BCl3 MFC set to  0.000000
10/28/2011	4:48:48 PM	PHl3 MFC set to  0.000000
10/28/2011	4:48:48 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:48:48 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:48:48 PM	Tube furnace set to 0
10/28/2011	4:49:55 PM	Helium valve closed
10/28/2011	4:49:55 PM	BCl3 valve closed
10/28/2011	4:49:55 PM	PH3 valve closed
10/28/2011	4:49:55 PM	SiCl4 pre valve closed
10/28/2011	4:49:55 PM	SiCl4 post valve closed
10/28/2011	4:49:55 PM	Main Vac valve closed
10/28/2011	4:49:55 PM	Bypass valve closed
10/28/2011	4:49:55 PM	H2 valve opened
10/28/2011	4:49:55 PM	Bubbler valve opened
10/28/2011	4:49:55 PM	Helium MFC set to  0.000000
10/28/2011	4:49:55 PM	H2 MFC set to  500.000000
10/28/2011	4:49:55 PM	BCl3 MFC set to  0.000000
10/28/2011	4:49:55 PM	PHl3 MFC set to  0.000000
10/28/2011	4:49:55 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:49:55 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:49:55 PM	Tube furnace set to 0
10/28/2011	4:49:56 PM	Helium valve closed
10/28/2011	4:49:56 PM	BCl3 valve closed
10/28/2011	4:49:56 PM	PH3 valve closed
10/28/2011	4:49:56 PM	SiCl4 pre valve closed
10/28/2011	4:49:56 PM	SiCl4 post valve closed
10/28/2011	4:49:56 PM	Main Vac valve closed
10/28/2011	4:49:56 PM	Bypass valve closed
10/28/2011	4:49:56 PM	H2 valve opened
10/28/2011	4:49:56 PM	Bubbler valve opened
10/28/2011	4:49:56 PM	Helium MFC set to  0.000000
10/28/2011	4:49:56 PM	H2 MFC set to  500.000000
10/28/2011	4:49:56 PM	BCl3 MFC set to  0.000000
10/28/2011	4:49:56 PM	PHl3 MFC set to  0.000000
10/28/2011	4:49:56 PM	SiCl4 MFC set to  0.000000
10/28/2011	4:49:56 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	4:49:56 PM	Tube furnace set to 1050
10/28/2011	5:09:56 PM	Helium valve closed
10/28/2011	5:09:56 PM	PH3 valve closed
10/28/2011	5:09:56 PM	Main Vac valve closed
10/28/2011	5:09:56 PM	Bypass valve closed
10/28/2011	5:09:56 PM	H2 valve opened
10/28/2011	5:09:56 PM	BCl3 valve opened
10/28/2011	5:09:56 PM	SiCl4 pre valve opened
10/28/2011	5:09:56 PM	SiCl4 post valve opened
10/28/2011	5:09:56 PM	Bubbler valve opened
10/28/2011	5:09:56 PM	Helium MFC set to  0.000000
10/28/2011	5:09:56 PM	H2 MFC set to  500.000000
10/28/2011	5:09:56 PM	BCl3 MFC set to  2.000000
10/28/2011	5:09:56 PM	PHl3 MFC set to  0.000000
10/28/2011	5:09:56 PM	SiCl4 MFC set to  50.000000
10/28/2011	5:09:56 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	5:09:56 PM	Tube furnace set to 1000
10/28/2011	5:24:56 PM	Helium valve closed
10/28/2011	5:24:56 PM	BCl3 valve closed
10/28/2011	5:24:56 PM	PH3 valve closed
10/28/2011	5:24:56 PM	SiCl4 pre valve closed
10/28/2011	5:24:56 PM	SiCl4 post valve closed
10/28/2011	5:24:56 PM	Main Vac valve closed
10/28/2011	5:24:56 PM	Bypass valve closed
10/28/2011	5:24:56 PM	H2 valve opened
10/28/2011	5:24:56 PM	Bubbler valve opened
10/28/2011	5:24:56 PM	Helium MFC set to  0.000000
10/28/2011	5:24:56 PM	H2 MFC set to  500.000000
10/28/2011	5:24:56 PM	BCl3 MFC set to  0.000000
10/28/2011	5:24:56 PM	PHl3 MFC set to  0.000000
10/28/2011	5:24:56 PM	SiCl4 MFC set to  0.000000
10/28/2011	5:24:56 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	5:24:56 PM	Tube furnace set to 750
10/28/2011	5:29:57 PM	H2 valve closed
10/28/2011	5:29:57 PM	BCl3 valve closed
10/28/2011	5:29:57 PM	PH3 valve closed
10/28/2011	5:29:57 PM	SiCl4 pre valve closed
10/28/2011	5:29:57 PM	SiCl4 post valve closed
10/28/2011	5:29:57 PM	Main Vac valve closed
10/28/2011	5:29:57 PM	Bypass valve closed
10/28/2011	5:29:57 PM	Helium valve opened
10/28/2011	5:29:57 PM	Bubbler valve opened
10/28/2011	5:29:57 PM	Helium MFC set to  500.000000
10/28/2011	5:29:57 PM	H2 MFC set to  0.000000
10/28/2011	5:29:57 PM	BCl3 MFC set to  0.000000
10/28/2011	5:29:57 PM	PHl3 MFC set to  0.000000
10/28/2011	5:29:57 PM	SiCl4 MFC set to  0.000000
10/28/2011	5:29:57 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	5:29:57 PM	Tube furnace set to 0
10/28/2011	5:49:57 PM	Helium valve closed
10/28/2011	5:49:57 PM	H2 valve closed
10/28/2011	5:49:57 PM	BCl3 valve closed
10/28/2011	5:49:57 PM	PH3 valve closed
10/28/2011	5:49:57 PM	SiCl4 pre valve closed
10/28/2011	5:49:57 PM	SiCl4 post valve closed
10/28/2011	5:49:57 PM	Main Vac valve closed
10/28/2011	5:49:57 PM	Bypass valve closed
10/28/2011	5:49:57 PM	Bubbler valve closed
10/28/2011	5:49:57 PM	Helium MFC set to  0.000000
10/28/2011	5:49:57 PM	H2 MFC set to  0.000000
10/28/2011	5:49:57 PM	BCl3 MFC set to  0.000000
10/28/2011	5:49:57 PM	PHl3 MFC set to  0.000000
10/28/2011	5:49:57 PM	SiCl4 MFC set to  0.000000
10/28/2011	5:49:57 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	5:49:57 PM	Tube furnace set to 0
10/28/2011	5:49:58 PM	Run finished at 5:49 PM
10/28/2011	6:11:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	6:11:54 PM	Recipe started at 6:11 PM
10/28/2011	6:11:54 PM	Helium valve closed
10/28/2011	6:11:54 PM	H2 valve closed
10/28/2011	6:11:54 PM	BCl3 valve closed
10/28/2011	6:11:54 PM	PH3 valve closed
10/28/2011	6:11:54 PM	SiCl4 pre valve closed
10/28/2011	6:11:54 PM	SiCl4 post valve closed
10/28/2011	6:11:54 PM	Main Vac valve closed
10/28/2011	6:11:54 PM	Bypass valve closed
10/28/2011	6:11:54 PM	Bubbler valve closed
10/28/2011	6:11:54 PM	Helium MFC set to  0.000000
10/28/2011	6:11:54 PM	H2 MFC set to  0.000000
10/28/2011	6:11:54 PM	BCl3 MFC set to  0.000000
10/28/2011	6:11:54 PM	PHl3 MFC set to  0.000000
10/28/2011	6:11:54 PM	SiCl4 MFC set to  0.000000
10/28/2011	6:11:54 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	6:11:54 PM	Tube furnace set to 0
10/28/2011	6:11:57 PM	H2 valve closed
10/28/2011	6:11:57 PM	BCl3 valve closed
10/28/2011	6:11:57 PM	PH3 valve closed
10/28/2011	6:11:57 PM	SiCl4 pre valve closed
10/28/2011	6:11:57 PM	SiCl4 post valve closed
10/28/2011	6:11:57 PM	Main Vac valve closed
10/28/2011	6:11:57 PM	Bypass valve closed
10/28/2011	6:11:57 PM	Bubbler valve closed
10/28/2011	6:11:57 PM	Helium valve opened
10/28/2011	6:11:57 PM	Helium MFC set to  500.000000
10/28/2011	6:11:57 PM	H2 MFC set to  0.000000
10/28/2011	6:11:57 PM	BCl3 MFC set to  0.000000
10/28/2011	6:11:57 PM	PHl3 MFC set to  0.000000
10/28/2011	6:11:57 PM	SiCl4 MFC set to  0.000000
10/28/2011	6:11:57 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	6:11:58 PM	Tube furnace set to 0
10/28/2011	6:11:59 PM	Helium valve closed
10/28/2011	6:11:59 PM	H2 valve closed
10/28/2011	6:11:59 PM	BCl3 valve closed
10/28/2011	6:11:59 PM	PH3 valve closed
10/28/2011	6:11:59 PM	SiCl4 pre valve closed
10/28/2011	6:11:59 PM	SiCl4 post valve closed
10/28/2011	6:11:59 PM	Main Vac valve closed
10/28/2011	6:11:59 PM	Bypass valve closed
10/28/2011	6:11:59 PM	Bubbler valve closed
10/28/2011	6:11:59 PM	Helium MFC set to  0.000000
10/28/2011	6:11:59 PM	H2 MFC set to  0.000000
10/28/2011	6:11:59 PM	BCl3 MFC set to  0.000000
10/28/2011	6:11:59 PM	PHl3 MFC set to  0.000000
10/28/2011	6:11:59 PM	SiCl4 MFC set to  0.000000
10/28/2011	6:11:59 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	6:11:59 PM	Tube furnace set to 0
10/28/2011	6:12:00 PM	Run finished at 6:12 PM
10/28/2011	6:12:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/28/2011	6:13:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/28/2011	6:13:44 PM	Recipe started at 6:13 PM
10/28/2011	6:13:44 PM	Helium valve closed
10/28/2011	6:13:44 PM	H2 valve closed
10/28/2011	6:13:44 PM	BCl3 valve closed
10/28/2011	6:13:44 PM	PH3 valve closed
10/28/2011	6:13:44 PM	SiCl4 pre valve closed
10/28/2011	6:13:44 PM	SiCl4 post valve closed
10/28/2011	6:13:44 PM	Main Vac valve closed
10/28/2011	6:13:44 PM	Bubbler valve closed
10/28/2011	6:13:44 PM	Bypass valve opened
10/28/2011	6:13:44 PM	Helium MFC set to  0.000000
10/28/2011	6:13:44 PM	H2 MFC set to  0.000000
10/28/2011	6:13:44 PM	BCl3 MFC set to  0.000000
10/28/2011	6:13:44 PM	PHl3 MFC set to  0.000000
10/28/2011	6:13:44 PM	SiCl4 MFC set to  0.000000
10/28/2011	6:13:44 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	6:13:44 PM	Tube furnace set to 0
10/28/2011	6:14:46 PM	Helium valve closed
10/28/2011	6:14:46 PM	H2 valve closed
10/28/2011	6:14:46 PM	BCl3 valve closed
10/28/2011	6:14:46 PM	PH3 valve closed
10/28/2011	6:14:46 PM	SiCl4 pre valve closed
10/28/2011	6:14:46 PM	SiCl4 post valve closed
10/28/2011	6:14:46 PM	Main Vac valve closed
10/28/2011	6:14:46 PM	Bubbler valve closed
10/28/2011	6:14:46 PM	Bypass valve opened
10/28/2011	6:14:46 PM	Helium MFC set to  0.000000
10/28/2011	6:14:46 PM	H2 MFC set to  0.000000
10/28/2011	6:14:46 PM	BCl3 MFC set to  0.000000
10/28/2011	6:14:46 PM	PHl3 MFC set to  0.000000
10/28/2011	6:14:46 PM	SiCl4 MFC set to  0.000000
10/28/2011	6:14:46 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	6:14:47 PM	Tube furnace set to 0
10/28/2011	6:15:47 PM	Helium valve closed
10/28/2011	6:15:47 PM	H2 valve closed
10/28/2011	6:15:47 PM	BCl3 valve closed
10/28/2011	6:15:47 PM	PH3 valve closed
10/28/2011	6:15:47 PM	SiCl4 pre valve closed
10/28/2011	6:15:47 PM	SiCl4 post valve closed
10/28/2011	6:15:47 PM	Bypass valve closed
10/28/2011	6:15:47 PM	Bubbler valve closed
10/28/2011	6:15:47 PM	Main Vac valve opened
10/28/2011	6:15:47 PM	Helium MFC set to  0.000000
10/28/2011	6:15:47 PM	H2 MFC set to  0.000000
10/28/2011	6:15:47 PM	BCl3 MFC set to  0.000000
10/28/2011	6:15:47 PM	PHl3 MFC set to  0.000000
10/28/2011	6:15:47 PM	SiCl4 MFC set to  0.000000
10/28/2011	6:15:47 PM	Bypass solenoid MFC set to  0.000000
10/28/2011	6:15:47 PM	Tube furnace set to 0
10/28/2011	6:15:48 PM	Run finished at 6:15 PM
10/28/2011	6:15:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
